2006
DOI: 10.1109/tia.2005.863898
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Microstepping control of ultrasonic stepping motors

Abstract: The ultrasonic stepping motor (USSM) using spatially shifted standing vibrations shows the advantages of high torque, good controllability, and open-loop operation. Due to the segmentation problem of piezoelectric materials, the corresponding step size is practically limited. The purpose of this paper is to propose and implement microstepping control of this USSM. Different from the available half-step operation, the proposed control simultaneously varies both the combination of phase excitations and the magni… Show more

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Cited by 7 publications
(2 citation statements)
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“…Therefore, it is necessary to adopt a new type of motor to improve the situation. As a prime mover, a rotating traveling wave ultrasonic motor (USM) offers low velocity, friction drive, self-locking, high-power density, high-position resolution, high positioning stiffness, and excellent electromagnetic compatibility [15,[21][22][23][24][25][26][27][28]. These unique characteristics have always attracted attention in the fields of aviation, medical care, robots, and precision driving [29][30][31][32][33].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is necessary to adopt a new type of motor to improve the situation. As a prime mover, a rotating traveling wave ultrasonic motor (USM) offers low velocity, friction drive, self-locking, high-power density, high-position resolution, high positioning stiffness, and excellent electromagnetic compatibility [15,[21][22][23][24][25][26][27][28]. These unique characteristics have always attracted attention in the fields of aviation, medical care, robots, and precision driving [29][30][31][32][33].…”
Section: Introductionmentioning
confidence: 99%
“…With the development in the field of nanofabrication, the precision table technology is imposing increasingly higher requirements for the stroke, speed, and accuracy of precision positioning systems, with the control accuracy required to be in the micrometer or even nanometer range [1][2][3]. With their advantages of simple structure, fast response, and high positioning accuracy, ultrasonic motors meet the requirements of precision positioning [4][5][6] and have a wide range of applications in precision instruments, aerospace, robotics, and biomedicine [7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%