2016
DOI: 10.1002/smll.201601947
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Microscale Silicon Origami

Abstract: A new methodology to create 3D origami patterns out of Si nanomembranes using pre-stretched and pre-patterned polydimethylsiloxane substrates is reported. It is shown this approach is able to mimic paper-based origami patterns. The combination of origami-based microscale 3D architectures and stretchable devices will lead to a breakthrough on reconfigurable systems.

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Cited by 34 publications
(26 citation statements)
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References 29 publications
(32 reference statements)
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“…Traditional manufacturing methods for assembling origami structures mainly rely on manual or machine‐assisted folding, which is challenging to implement on small scales and advanced materials . Self‐folding ranging from nanoscale to microscale and macroscale of various materials including metals, semiconductors, and polymers have been achieved by self‐actuating materials (e.g., shape memory materials), or using stimuli‐active hinges (e.g., by heat, light, or electricity), capillary forces, or residual stresses in the thin film. Figure c illustrates the process of self‐folding Al 2 O 3 facets with Au patterns.…”
Section: Structural Designs For Soft Electronicsmentioning
confidence: 99%
“…Traditional manufacturing methods for assembling origami structures mainly rely on manual or machine‐assisted folding, which is challenging to implement on small scales and advanced materials . Self‐folding ranging from nanoscale to microscale and macroscale of various materials including metals, semiconductors, and polymers have been achieved by self‐actuating materials (e.g., shape memory materials), or using stimuli‐active hinges (e.g., by heat, light, or electricity), capillary forces, or residual stresses in the thin film. Figure c illustrates the process of self‐folding Al 2 O 3 facets with Au patterns.…”
Section: Structural Designs For Soft Electronicsmentioning
confidence: 99%
“…The patterned structure was transferred to a water soluble tape to expose the backside surface. The surface chemical treatments (e.g., ultraviolet/ozone treatments) were used to introduce hydroxy group to the certain bonding sites (i.e., anchors) of backside surface with the help of lithography. Then, the patterned nanomembrane was finally transferred to a tensilely prestrained silicone elastomer, whose surface was also chemically functionalized with hydroxy group.…”
Section: Nanomembrane Origamimentioning
confidence: 99%
“…While traditional origami is made from paper, engineering applications of origami generally use a wide range of materials, including polymers [63][64][65], metals [38,66], composites [33,34], silicon [67], wood, etc. The size range of origami-inspired engineering forms can run from microscopic [43,68,69] to building size [18,70].…”
Section: Introductionmentioning
confidence: 99%