Microscale Friction Reduction by Normal Force Modulation in MEMS

Spengen, W. Merlijn van; Wijts, G.; Turq, Viviane; Frenken, J.W.M.

doi:10.1163/016942410x508226

Cited by 12 publications

(10 citation statements)

References 40 publications

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“…, but strong effects are also observed when the excitation is oriented perpendicular to the sliding interface. In micro‐ and macro‐contacts, the amplitude of such excitations is increased to the point where the two surfaces are briefly separated during every oscillation cycle, which leads to arbitrarily large reductions in the lateral (friction) force required to make the system slide, as has been demonstrated in MEMS devices in . On the smaller scale of FFM experiments a more refined possibility exists, that has been nick‐named “dynamic superlubricity” .…”

Section: Effects Of Temperature and Velocitymentioning

confidence: 99%

The physics of atomic‐scale friction: Basic considerations and open questions

Krylov

Frenken

2014

Phys. Status Solidi B

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The field of friction is usually associated with its obvious practical importance. This tends to emphasize the engineering aspects of friction and thereby hides the fact that there is a wealth of interesting physics involved, part of which cannot be regarded as fully understood at present. New techniques, such as friction force microscopy, have started to provide access to the phenomenon of friction on the atomic scale. This has given a strong impulse to the field of tribology, pushing it significantly beyond the engineering level and into the regime of the fundamental aspects of frictional energy dissipation. This article reflects the authors’ personal view on matters of interest in the field of atomic‐scale friction. Rather than to review important contributions in this field, we have chosen to summarize what has been learned and identify phenomena that may seem familiar to tribologists but actually should be regarded as non‐trivial from a physical point of view.

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Section: Effects Of Temperature and Velocitymentioning

confidence: 99%

The physics of atomic‐scale friction: Basic considerations and open questions

Krylov

Frenken

2014

Phys. Status Solidi B

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“…The samples used in the previous studies about friction reducing by oscillations [3][4][5][6] were conventional solid materials. CNT film has fibrous structure.…”

Section: Resultsmentioning

confidence: 99%

“…Although this method is not used in conventional sized machines (in non-micro-scale machines), it could be appropriate for use in MEMS devices with moving parts (described here as moving MEMS devices). In fact, friction reducing effects produced by vibration normal load have been observed in a MEMS device [3].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, MEMS bearing and gear devices-in which surfaces contact with each other-do not function well. Another method for the reduction of friction forces applies oscillations of motions or normal loads between two sliding surfaces, which has been widely applied with various normal load ranges, from nanonewtons to newtons [3][4][5][6]. Although this method is not used in conventional sized machines (in non-micro-scale machines), it could be appropriate for use in MEMS devices with moving parts (described here as moving MEMS devices).…”

Section: Introductionmentioning

confidence: 99%

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Reducing the High Frictions on Carbon Nanotube Films by Applying an Oscillating Motion under Micronewton Loads

et al. 2012

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Under micronewton loads, the high frictions on carbon nanotube (CNT) films (with a friction coefficient of 1.7) were decreased to less than the noise level (which was roughly a friction coefficient of 0.05) by applying an oscillating motion to a cantilever on which a sliding ball was glued. This large decrease of the friction coefficient has been never observed in previous studies. The applied oscillating motion caused the twisting and bending oscillations of the cantilever, which applied the lateral and normal oscillating forces to the sliding ball. The friction force decreased with increasing the oscillating amplitudes of the twisting and bending forces, and the frequency dependences of the friction force reduction was observed.

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“…To demonstrate the merits of the curve-fitting technique, we will show several measurements using three different MEMS actuators: the nano-ram adhesion sensor comb drive [21] shown in figure 1a that we used earlier in this paper to explain the technique, a 'Leiden MEMS tribometer' [23] and a novel nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) based adhesion sensor [24]. The intensity profiles of their beam springs look slightly different, but the devices are similar in design.…”

Section: Methodsmentioning

confidence: 99%

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Kokorian

Buja

Spengen

2015

J. Microelectromech. Syst.

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Abstract-In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam that was captured with a CCD camera on an optical microscope. The position resolution depends on the amount of pixel noise and on how the moving feature is spread across the detector pixels. The resolution is usually limited by photon shot noise, which can be controlled and lowered in several ways. To demonstrate the technique we measure the adhesion snap-off of two silicon surfaces. We assess the accuracy of the technique using two different silicon MEMS devices and an experimental ultrananocrystalline diamond device. The lowest position noise that we report is obtained by summing 1 577 image lines and is as low as 60 pm root mean square.[ 2014-0040]Index Terms-Displacement measurement, optical noise, optical image processing, optical position measurement, MEMS, subpixel resolution.

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Microscale Friction Reduction by Normal Force Modulation in MEMS

Cited by 12 publications

References 40 publications

The physics of atomic‐scale friction: Basic considerations and open questions

The physics of atomic‐scale friction: Basic considerations and open questions

Reducing the High Frictions on Carbon Nanotube Films by Applying an Oscillating Motion under Micronewton Loads

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

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