Microreactor for Clean and Controlled In-situ SEM Imaging of CVD Processes

Battery in situ Electrical Testing in FIB-SEM

“…The MEMS holder [1], which was so far described as the electrical testing holder, also provides possibility for sample heating and enables in situ SEM imaging of battery materials transformation at high temperatures (40°C to 1200°C). The heating option can further be combined with delivery of reactive gases into the sample area [5]. This approach allows for in situ SEM imaging of battery materials synthesis controlled by the sample temperature and by the composition of injected gas.…”