Micropatterned epitaxial (Pb,La)(Zr,Ti)O3 thin films on Nb-doped SrTiO3 substrates by a chemical solution deposition processwith resist molds

Abstract

Arrays of lead lanthanum zirconate titanate pillars were fabricated on niobium-doped (001) strontium titanate substrates using a chemical solution deposition method with resist molds. Periodic arrays of submicron ferroelectric pillars with high crystallinity are required to produce high-quality tunable photonic-crystal devices. The relationship between the crystallinity and width of the pillars was investigated. The highest crystallinity was obtained at a width of 0.67μm. All the pillars exhibited ferroelectric strain. Since this width is in the order of that of optical wavelengths, this process and the periodic structures produced have potential applications in fabricating two-dimensional tunable photonic crystals.

Wet etching of sol-gel deposited lead lanthanum zirconate titanate for photonic crystal applications

“…14 A related structure consisting of a square array of PLZT pillars in air have been realized using spin coating of precursors on ebeam patterned photoresist followed by careful polishing of the PLZT overlayer. 15 In this report, we propose an electrically tunable 2-D PC microcavity by incorporating PLZT 8/65/35 with top and bottom Pt electrodes as the superdefect material in our 2-D PC microcavity. We fabricate the PLZT electrode by spin coating and pyrolyzing a sol-gel precursor, depositing and patterning a positive resist with e-beam lithography, sputtering a Pt top electrode/etch mask, and wet etching PLZT using a HCl-based etchant.…”

Fabrication and characterization of micropatterned barium titanate ceramics

“…Recently, patterned/micropatterned electroceramic thin films have attracted growing interest in device applications such as capacitor arrays [1], ferroelectric random access memories (FeRAM) [2], microelectromechanical systems (MEMS) [3], electroluminescent devices [4], and tunable photonic crystals [5]. In addition, the continuing trend of miniaturization in the microelectronics industry requires integration of such electroceramic thin films into electroceramic packages.…”

Barium modified lead lanthanum strontium zirconium niobium titanate for dielectric and piezoelectric properties

“…The incorporation of La 3+ ions into Pb(Zr,Ti)O 3 , ceramics increases their dielectric constants and coupling factors. 3 The influence of various modifiers like Sm, 4 Ba, 5 Sr, 6 Nb, 7 Na, 8 Ag, 9 Dy 10 , etc., have been extensively investigated for various specific properties required in either thin films or bulk ceramics. The various modifiers on hard PZT's or soft PZT's both on A-site (Pb) and/or Bsite (Zr/Ti) sites with pentavalent, isovalent and/or aliovalent elements or donor/acceptor ions can effect the microstructural development and electromechanical properties of the ceramics.…”