Abstract:A new patterning method combining electron beam (EB) lithography and electrophoretic deposition (EPD) for fabricating micropatterned barium titanate (BaTiO 3 ) thin films was investigated. At first, resist molds with high resolution were prepared using EB lithography on Pt/Ti/Si substrates. Then BaTiO 3 nanoparticles were deposited on the substrates by EPD from a transparent suspension of monodispersed BaTiO 3 nanoparticles; a mixed solvent of 2-methoxyethonal and acetylacetone with a 9:1 volumetric ratio was … Show more
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