Microminiature ganged threshold accelerometers compatible with integrated circuit technology

Frobenius, W.D.; Zeitman, S.A.; White, M.H.; O'Sullivan, D. D.; Hamel, Ryan

doi:10.1109/t-ed.1972.17368

Cited by 65 publications

(31 citation statements)

References 2 publications

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“…The concept of micro-machined threshold accelerometer sensor was introduced back in 1972 (Frobenius, Zeitman, White, O'Sullivan & Hamel, 1972), which was farfetched but well accepted. Since then, the MEMS technology has seen significant advancements in the past decades.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity-Based Reliability Analysis of MEMS Acceleration Switch

Kansal¹,

Kasturi²,

Kim³

et al. 2017

MAS

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MEMS acceleration switches have been used in many engineering applications. In this paper, the reliability of MEMS switch is evaluated under various uncertainties from materials and manufacturing process. First, the performance of MEMS switch is modeled using 1D mass-spring-damper-contact system. Different from conventional lumped element methods, the model includes the effect of geometric parameters as well as contact conditions. The parameters of 1D models are calibrated using a high-fidelity finite element model. For reliability assessment, four different methods are used in order to compare computational cost as well as accuracy in predicting reliability. It turned out that sensitivity-based reliability method has several benefits, such as computational time and identifying important parameters that contribute significantly to reliability. The sensitivity analysis showed that the cross-sectional height and the length of folded-beam contribute most significantly to the reliability of switch-on condition. After changing the length of the beam, the probability of failure was improved from 0.168 to 0.0003.

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Section: Introductionmentioning

confidence: 99%

Sensitivity-Based Reliability Analysis of MEMS Acceleration Switch

Kansal¹,

Kasturi²,

Kim³

et al. 2017

MAS

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“…acceleration switches) based on MEMS are widely used in many applications such as automobiles, accessories, and toys Zimmermann et al 1995;Tønnesen et al 1997;Wycisk et al 2000). As a typical kind of inertial sensor, the micro-machined vibration threshold sensor has been reported in a lot of literature published since Frobenius et al 1972 presented an all-metal micro-cantilever electromechanical acceleration switch. However, most of them still used a rigid block without elastic contact structure as the stationary electrode and has only ~1 μs short contact time, which will be very difficult and obstacle for the next circuit analyzing and signal processing in many practical applications.…”

Section: Introductionmentioning

confidence: 99%

Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor

et al. 2015

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“…For early-warning or trigger/wakeup-type applications, however, low resolution is an acceptable tradeoff for small form factor. Acceleration switches were one of the earliest MEMS devices [3]. There has been periodic research on MEMS acceleration switches of various types throughout the last 30 years, but every type/configuration has been a single axis sensor (e.g., [4][5][6][7] among several others).…”

Section: Introductionmentioning

confidence: 99%

3-Axis acceleration switch for traumatic brain injury early warning

Currano

Becker

Smith

et al. 2012

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)

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This paper reports on the design, fabrication, and testing of a 3-axis acceleration switch intended to serve as an early warning for traumatic brain injury (TBI). Mild TBI (colloquially termed "concussion") resulting from rapid acceleration of the skull has been rising in the public consciousness with recently increasing awareness of the dangers and long-term health risks associated with it. The sensor described here is an array of acceleration switches designed to cover the range of acceleration associated with TBI, and to do so with no external power draw until an acceleration event within this range occurs.

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Microminiature ganged threshold accelerometers compatible with integrated circuit technology

Cited by 65 publications

References 2 publications

Sensitivity-Based Reliability Analysis of MEMS Acceleration Switch

Sensitivity-Based Reliability Analysis of MEMS Acceleration Switch

Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor

3-Axis acceleration switch for traumatic brain injury early warning

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