Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor

Yang, Zhuoqing; Chen, Wenguo; Ding, Guifu; Wang, Yan; Wang, Hong; Zhao, Xiaolin

doi:10.1007/s00542-015-2578-4

Cited by 2 publications

(2 citation statements)

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“…Sensing the impact acceleration signal is widely employed in automotive domains, which can help to trigger a safety mechanism when a sudden impact occurs [7][8][9][10][11][12]. The ampl itude of the acceleration pulse is above 50 g with pulse width ranging from a micronsecond to a millisecond.…”

Section: Introductionmentioning

confidence: 99%

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Conception, fabrication and characterization of a silicon based MEMS inertial switch with a threshold value of 5 g

Zhang

Wang

Ming-quan

et al. 2017

J. Micromech. Microeng.

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Most of the MEMS inertial switches developed in recent years are intended for shock and impact sensing with a threshold value above 50 g. In order to follow the requirement of detecting linear acceleration signal at low-g level, a silicon based MEMS inertial switch with a threshold value of 5 g was designed, fabricated and characterized. The switch consisted of a large proof mass, supported by circular spiral springs. An analytical model of the structure stiffness of the proposed switch was derived and verified by finite-element simulation. The structure fabrication was based on a customized double-buried layer silicon-on-insulator wafer and encapsulated by glass wafers. The centrifugal experiment and nanoindentation experiment were performed to measure the threshold value as well as the structure stiffness. The actual threshold values were measured to be 0.1–0.3 g lower than the pre-designed value of 5 g due to the dimension loss during non-contact lithography processing. Concerning the reliability assessment, a series of environmental experiments were conducted and the switches remained operational without excessive errors. However, both the random vibration and the shock tests indicate that the metal particles generated during collision of contact parts might affect the contact reliability and long-time stability. According to the conclusion reached in this report, an attentive study on switch contact behavior should be included in future research.

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Section: Introductionmentioning

confidence: 99%

“…In recent years, MEMS switches for impact sensing have been intensively reported [7][8][9][10][11][12][13][14][15]. Several types of metal based impact MEMS switches have been commercialized with a threshold value up to 4500 g and a fast response time of below 50 µs [18].…”

Section: Introductionmentioning

confidence: 99%