Micromechanical Gratings for Visible and Near-Infrared Spectroscopy

Sagberg, Håkon; Lacolle, Matthieu; Johansen, Ib-Rune; Lvhaugen, O.; Belikov, Ruslan; Solgaard, Olav; Sudb, A.

doi:10.1109/jstqe.2004.828491

Cited by 38 publications

(12 citation statements)

References 7 publications

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“…Early MEMS diffractive filters that were designed for normal incidence [136] are therefore useful only for lowresolution applications. Better resolution can be obtained by adding another diffractive element [137] or by creating a diffractive structure with high diffraction angle [138].…”

Section: H Diffractive Spectrometers and Spectral Synthesismentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

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Section: H Diffractive Spectrometers and Spectral Synthesismentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

303

141

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“…In our recent publication, 5 we demonstrated that a gradient searching Davidon-Fletcher-Powell (DFP) algorithm [6][7][8] is very effective in optimizing the depth profile {d m } to retrieve IR spectra of gases. The IR spectra of SF 6 , NH 3 , SO 2 and ethylene at the diffraction angle θ = 15 o were successfully retrieved in the spectral range of 725-1450 cm −1 using 1126 parallel lines in the overall size of 1.5 cm.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Microgratings and their IR Diffraction Spectra

Kim¹,

Choi²,

Kim

et al. 2014

Bulletin of the Korean Chemical Society

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Microgratings whose diffracted field at a fixed angle generate IR spectra of SF6 or NH3 were fabricated by MEMS techniques for the purpose of IR correlation spectroscopy. Each micrograting was composed of 1441 reflecting lines in the area of 19.2 × 19.2 mm 2 . The depth profile of the line elements was determined with a gradient searching method that was described in our previous publication (J. Mod. Opt. 2013, 60, 324-330), and was discretized into 16 levels between 0 and 6.90 μm. The diffraction field from a given depth profile was calculated with Fraunhofer equation. The fabricated microgratings showed errors in the depth and the width within acceptable ranges. As the result, the diffracted IR spectrum of each micrograting matched well with its target reference spectrum within spectral resolution of our optical setup.

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“…al.. 1 This replaces what would otherwise be a large, complex optical element. An example for an imaging sensor is the TOMBO microlens array produced by Tanida and Yamada, 2 intended to operate without the presence of an external lens.…”

Section: Introductionmentioning

confidence: 99%

An image sensor with on-die diffractive optics in 0.18μm bulk CMOS

Thomas

Hornsey

2006

SPIE Proceedings

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On-die optics are an attractive way of reducing package size for imaging and non-imaging optical sensors. While systems incorporating on-die optics have been built for imaging and spectral analysis applications, these have required specialized fabrication processes and additional off-die components. This paper discusses the fabrication of an image sensor with neither of these limitations. Through careful design, an image sensor is implemented that uses on-die diffractive optics fabricated using a standard 0.18µm bulk CMOS process, with simulations indicating that the resulting die is capable of acting as a standalone imaging system resolving spatial features to within ±0.15 radian and spectral features to within ±40 nm wavelength accuracy.

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Micromechanical Gratings for Visible and Near-Infrared Spectroscopy

Cited by 38 publications

References 7 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

Fabrication of Microgratings and their IR Diffraction Spectra

An image sensor with on-die diffractive optics in 0.18μm bulk CMOS

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