Micromachining with industrial picosecond lasers

Klimt, Bernhard H.

doi:10.1002/latj.200790142

Cited by 6 publications

(2 citation statements)

References 4 publications

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“…n p is defined as the number of times the path is traced. Although femtosecond pulse laser demonstrates excellent ability of for fabrication of FS [24], picosecond pulse laser appears as an attractive alternative as its acceptable performance and cost [25]. Here, we demonstrate an efficient method of ablation procedure with picosecond pulse laser.…”

Section: Laser Parameters Optimizationmentioning

confidence: 95%

Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Yan

Lü

et al. 2021

J. Micromech. Microeng.

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Fused silica (FS) micro hemispherical resonators have attracted considerable interest for application in high-performance sensors. Manufacturing of resonators with extremely high quality factor and acceptable cost is currently the main challenge. Here, we demonstrate the application of ultrafast laser in manufacturing of three-dimensional (3D) FS micro hemispherical resonators with unrestricted edge shapes. The 3D FS structures fabricated from micro glassblowing are detached from substrates by direct laser ablation with amplification tines, which is useful for improving the performance of the resonators. Resonators fabricated from direct laser ablation are experimentally characterized, exhibiting quality factors over millions via electrostatically characterization. This is the first time that ultrafast lasers are exploited in the manufacturing of mechanical resonators, while obtaining satisfactory performance. Effective integration of the laser ablation into current devices will greatly improve the fabrication ability, generating important implications for future micro electronic devices.

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Section: Laser Parameters Optimizationmentioning

confidence: 95%

Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Yan

Lü

et al. 2021

J. Micromech. Microeng.

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show abstract

“…Initially, burst-mode processing was promoted by commercial companies for high-average power picosecond lasers [8][9][10] to reach higher level of machining quality and productivity. In experimental studies, it is demonstrated, therefore, that the ablation rate increases substantially if operating picosecond lasers in burst-mode regime and 20-ns inter-pulse delay instead of irradiating high-energy pulses at similar average laser power [11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Experimental study on double-pulse laser ablation of steel upon multiple parallel-polarized ultrashort-pulse irradiations

et al. 2016

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In this paper, double-pulse laser processing is experimentally studied with the aim to explore the influence of ultrashort pulses with very short time intervals on ablation efficiency and quality. For this, sequences of 50 double pulses of varied energy and inter-pulse delay, as adjusted between 400 fs and 18 ns by splitting the laser beam into two optical paths of different length, were irradiated to technical-grade stainless steel. The depth and the volume of the craters produced were measured in order to evaluate the efficiency of the ablation process; the crater quality was analyzed by SEM micrographs. The results obtained were compared with craters produced with sequences of 50 single pulses and energies equal to the double pulse. It is demonstrated that double-pulse processing cannot exceed the ablation efficiency of single pulses of optimal fluence, but the ablation crater surface formed smoother if inter-pulse delay was in the range between 10 ns and 18 ns. In addition, the influence of pulse duration and energy distribution between the individual pulses of the double pulse on ablation was studied. For very short inter-pulse delay, no significant effect of energy variation within the double pulse on removal rate was found, indicating that the double pulse acts as a big single pulse of equal energy. Further, the higher removal efficiency was achieved when double-pulse processing using femtosecond pulses instead of picosecond pulses.

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Picosecond laser surface micropatterning of ceramics by optical fiber induction

et al. 2015

Appl. Phys. A

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Micromachining with industrial picosecond lasers

Cited by 6 publications

References 4 publications

Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions

Experimental study on double-pulse laser ablation of steel upon multiple parallel-polarized ultrashort-pulse irradiations

Picosecond laser surface micropatterning of ceramics by optical fiber induction

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