Micromachining of non-fouling coatings for bio-MEMS applications

Hanein, Yael; Pan, Yayue; Ratner, Buddy D.; Denton, Denice D.; Böhringer, K. F.

doi:10.1016/s0925-4005(01)00925-x

Cited by 68 publications

(53 citation statements)

References 17 publications

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“…Grafting by way of photoinduced polymerization or chemical surface attachment to silicon oxide are two common preparative methods [122], [124], [127]. Vapor deposition techniques [122] and gas-phase plasma polymerization [123] also yield polymer-coated surfaces. The grafting of PEG onto cationic polymer chains such as poly (L-lysine) enables attachment to negatively charged surfaces (silica and some metal oxides) via simple electrostatic interactions [128].…”

Section: ) Surface Immobilized Polymersmentioning

confidence: 99%

“…The system reduces by approximately a factor of ten the amount of bovine serum albumin that adheres to unmodified silicon in devices. Hanein et al [123] fabricate micromachined PEG films using standard photolithographic techniques. The technique shows promise due to its application to myriad surfaces, including silicon, silicon oxide, silicon nitride, gold, and platinum.…”

Section: ) Surface Immobilized Polymersmentioning

confidence: 99%

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A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

et al. 2004

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Section: ) Surface Immobilized Polymersmentioning

confidence: 99%

Section: ) Surface Immobilized Polymersmentioning

confidence: 99%

A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

et al. 2004

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“…The components of the device outside the cell are also susceptible to cell attachment. To resolve these problems, surface modification techniques [27,32] can be integrated with standard MEMS processes and can dramatically reduce protein and cell attachment. It has also been shown that a thin non-fouling coating may provide protection to coated electrodes from protein adsorption and cell attachment without compromising their conductivity [32].…”

Section: Mems Neural Probesmentioning

confidence: 99%

Towards MEMS Probes for Intracellular Recording

et al. 2002

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Simultaneous, multi-site recording from the brain of freely behaving animals will allow neuroscientists to correlate neuronal activity with external stimulation and behavior. This information is critical for understanding the complex interactions of brain cells. Recent interest in microelectromechanical systems (MEMS) and in particular in bio-MEMS research has led to miniaturization of microelectrodes for extracellular neuronal recording. MEMS technology offers a unique opportunity to build compact, integrated sensors well suited for multi-site recording from freely behaving animals. These devices have the combined capabilities of silicon-integrated circuit processing and thin-film microelectrode sensing. MEMS probes for intracellular recording may offer significantly improved signal quality. Here we discuss the basic concepts that underlie the construction of intracellular MEMS probes. We first review the basics of neuronal signaling and recording, and the principles of microelectrode technology and techniques. Progress in MEMS technology for neuronal recording is then discussed. Finally, we describe MEMS probes for intracellular recording, viz., fabrication of micro-machined silicon needles capable of penetrating cell membranes. Using these needles, we recorded localized extracellular signals from the hawk moth Manduca sexta and obtained first recordings with silicon-based micro-probes from the inside of neurons, using an isolated brain of the sea slug Tritonia diomedea.

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“…The heaters are passivated with sputtered silicon nitride (400nm) and the entire device is then treated with ppNIPAM in a plasma deposition process [2]. This process is particularly suited for MEMS applications as it ensures very high surface coverage, excellent adhesion and good non-fouling properties at room temperature [3]. Coventor, a fully integrated finite element simulation package, is used to simulate the electrothermal properties of the designed heaters (Figure 3).…”

Section: Methodsmentioning

confidence: 99%

Protein Patterning with Programmable Surface Chemistry Chips

Wang

Cheng

Hanein

et al. 2002

Micro Total Analysis Systems 2002

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Programmable surface chemistry has been achieved by depositing thermally responsive polymer (plasma polymerized N-isopropylacrylamide, ppNIPAM) onto arrays of micro-fabricated metallic heaters. Activating a single heater causes a localized change in the device surface chemistry from non-fouling to fouling in aqueous environment. Various proteins were used to demonstrate localized immobilization of proteins on the surface of coated micro-heater arrays. Additional uses of this technique include applications such as cell patterning, tissue engineering, self-assembly, etc.

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Micromachining of non-fouling coatings for bio-MEMS applications

Cited by 68 publications

References 17 publications

A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

Towards MEMS Probes for Intracellular Recording

Protein Patterning with Programmable Surface Chemistry Chips

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