A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

Grayson, Amy C. Richards; Shawgo, Rebecca S.; Johnson, Audrey M.; Flynn, Nolan T.; Li, Yawen; Cima, Michael J.; Langer, Robert

doi:10.1109/jproc.2003.820534

Cited by 480 publications

(269 citation statements)

References 159 publications

(134 reference statements)

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“…Films and pallets were fabricated in a manner similar to that previously described. 29-31 SU-8 films with different thickness (10,25,50,75, and 100 μm) were obtained by spin-coating SU-8 photoresist on glass slides following the protocol provided by MicroChem Corp. 1,33,34…”

Section: Fabrication Of Films and Pallets From Su-8 Or 1002f Photoresistmentioning

confidence: 99%

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Photoresist with Low Fluorescence for Bioanalytical Applications

et al. 2007

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The negative photoresist SU-8 has found widespread use as a material in the fabrication of microelectrical-mechanical systems (MEMS). While SU-8 has been utilized as a structural material for biological MEMS, a number of SU-8 properties limit its application in these bioanalytical devices. These attributes include its brittleness, nonspecific adsorption of biomolecules, and high fluorescence in the visible wavelengths. In addition, native SU-8 is a poor substrate for cellular adhesion. Photoresists composed of resins with epoxide side groups and photoacids were screened for their ability to serve as a low fluorescence photoresist with sufficient resolution to generate microstructures with dimensions of 5-10 μm. The fluorescence of structures formed from 1002F photoresist (1002F resin combined with triarylsulfonium hexafluoroantimonate salts) was as much as 10 times less fluorescent than similar SU-8 microstructures. The absorbance of 1002F in the visible wavelengths was also substantially lower than that of SU-8. Microstructures or pallets with an aspect ratio as high as 4:1 could be formed permitting 1002F to be used as a structural material in the fabrication of arrays of pallets for sorting adherent cells. Several different cell types were able to adhere to native 1002F surfaces and the viability of these cells was excellent. As with SU-8, 1002F has a weak adhesion to glass, a favorable attribute when the pallet arrays are used to sort adherent cells. A threshold, laserpulse energy of 3.5 μJ was required to release individual 50-μm, 1002F pallets from an array. Relative to SU-8, 1002F photoresist offers substantial improvements as a substrate in bioanalytical devices and is likely to find widespread use in BioMEMS.

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Section: Fabrication Of Films and Pallets From Su-8 Or 1002f Photoresistmentioning

confidence: 99%

“…23,24 Native SU-8 is hydrophobic and prone to nonspecific adsorption of bioanalytes. [25][26][27][28] In addition, most biological cells will not attach to native SU-8. Potentially the greatest weakness of SU-8 though is its high fluorescence in the visible wavelengths.…”

Section: Introductionmentioning

confidence: 99%

Photoresist with Low Fluorescence for Bioanalytical Applications

et al. 2007

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“…biomaterials | resorbable electronics | drug delivery | theranostics | silk I mplantable medical devices with increasing sophistication, such as those containing electronic components (1), are being developed for a variety of therapeutic or functions such as cardiovascular regulation, drug delivery, programmable therapy, or enhancement of biological structures (2). These devices are designed to operate while embedded in living tissue, which can lead to complications and restrictions on material constituents and form factors (3).…”

mentioning

confidence: 99%

Silk-based resorbable electronic devices for remotely controlled therapy and in vivo infection abatement

Tao

Hwang

Marelli

et al. 2014

Proc. Natl. Acad. Sci. U.S.A.

287

279

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A paradigm shift for implantable medical devices lies at the confluence between regenerative medicine, where materials remodel and integrate in the biological milieu, and technology, through the use of recently developed material platforms based on biomaterials and bioresorbable technologies such as optics and electronics. The union of materials and technology in this context enables a class of biomedical devices that can be optically or electronically functional and yet harmlessly degrade once their use is complete. We present here a fully degradable, remotely controlled, implantable therapeutic device operating in vivo to counter a Staphylococcus aureus infection that disappears once its function is complete. This class of device provides fully resorbable packaging and electronics that can be turned on remotely, after implantation, to provide the necessary thermal therapy or trigger drug delivery. Such externally controllable, resorbable devices not only obviate the need for secondary surgeries and retrieval, but also have extended utility as therapeutic devices that can be left behind at a surgical or suturing site, following intervention, and can be externally controlled to allow for infection management by either thermal treatment or by remote triggering of drug release when there is retardation of antibiotic diffusion, deep infections are present, or when systemic antibiotic treatment alone is insufficient due to the emergence of antibiotic-resistant strains. After completion of function, the device is safely resorbed into the body, within a programmable period.biomaterials | resorbable electronics | drug delivery | theranostics | silk

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“…Current applications extend to implantable neuroprosthetic devices [2] such as cochlear implants [3] and neural stimulating electrodes [4][5][6], as well as microfabricated devices targeting temperature, blood pressure, immuno-isolation, drug delivery, and microinjection [7,8]. Still, one critical issue has remained with respect to the power supply since stringent size constraints of the implant have compromised the available space required by batteries.…”

Section: Introductionmentioning

confidence: 99%

Thin film nanoporous electrodes for the selective catalysis of oxygen in abiotically catalysed micro glucose fuel cells

et al. 2016

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Selective reduction of oxygen is an important property of fuel cells designed to operate in a mixed fuel environment containing both oxidizing and reducing reactants. This would be of particular importance in the design of a long lasting energy supply unit powering implantable microsystems and running from exogeneous chemicals that is abundant in the body (such as glucose and oxygen). This paper presents the development of a nanoporous electrode for oxygen reduction in the presence of glucose. The electrode was fabricated by e-beam deposition of palladium thin films on porous ceramic aluminium oxide (AAO) substrates with a pore size of 100 and 200 nm respectively. The porous nature of the electrodes improved the catalytic properties by increasing the real surface area close to 100 times the geometric surface area. At a dissolved physiological oxygen (DO) concentration of 2 ppm, the maximum exchange current density was found to be 2.9×10 −3 ± 0.5×10 −3 µA cm −2 whereas the potential reduction due to the addition of 5 mM glucose was about 20.6 ± 16.1 mV. The Tafel slopes were measured to be about 60 mV per decade. After running for 21 hours in a physiological saline solution with 2 ppm DO and 3 mM glu- cose, the reduction in the electrode operational potential was -0.13 mV h −1 under a load current density of 4.4 µA cm −2 . These results suggest that nanoporous AAO cathodes coated with palladium offers a reasonable catalytic performance with a good selectivity towards oxygen in the presence of glucose.

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A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices

Cited by 480 publications

References 159 publications

Photoresist with Low Fluorescence for Bioanalytical Applications

Photoresist with Low Fluorescence for Bioanalytical Applications

Silk-based resorbable electronic devices for remotely controlled therapy and in vivo infection abatement

Thin film nanoporous electrodes for the selective catalysis of oxygen in abiotically catalysed micro glucose fuel cells

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