2010
DOI: 10.1115/1.4000836
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Micromachining of Metals, Alloys, and Ceramics by Picosecond Laser Ablation

Abstract: Microhole drilling and microstructure machining with a picosecond (ps) Nd:YVO4 laser (pulse duration of 10 ps) in metals, alloys, and ceramics are reported. Blind and through microholes are drilled by percussion drilling as well as trepanning drilling, where the diameters of the holes are in the range of 20–1000 μm. Microfeatures are also machined and the flexibility of ps laser machining is demonstrated. The quality of drilled holes, e.g., recast layer, microcrack, and conicity, and that of the microstructure… Show more

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Cited by 41 publications
(14 citation statements)
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“…Hu et al [83] reported micro-hole drilling and micro-structure machining in metals, alloys and ceramics using ps laser. Holes of below 50 mm diameter in steel, Si 3 N 4 and SiC/SiC were fabricated with percussion drilling technique by using laser of wavelength 532 nm or 1064 nm.…”
Section: Lbmm Using Ps Lasersmentioning
confidence: 99%
See 1 more Smart Citation
“…Hu et al [83] reported micro-hole drilling and micro-structure machining in metals, alloys and ceramics using ps laser. Holes of below 50 mm diameter in steel, Si 3 N 4 and SiC/SiC were fabricated with percussion drilling technique by using laser of wavelength 532 nm or 1064 nm.…”
Section: Lbmm Using Ps Lasersmentioning
confidence: 99%
“…The electronic properties may be obtained from a modified ThomasFermi statistical model and the ionic properties are calculated by Cowan model [83].…”
Section: Initial Conditionsmentioning
confidence: 99%
“…Ultra-short laser pulses have a broad range of industrial applications and have been used for surface modifications of solid materials and precise micromachining [1][2][3] . In order to further optimize the laser process a deep understanding of the dynamics behind the laser ablation is essential.…”
Section: Introductionmentioning
confidence: 99%
“…However, the formation of recast layer and the thermal damage to the workpiece has caused much attention when using these lasers [18]. It has been suggested that a reduction in pulse duration down to picosecond and femtosecond scale could probably overcome these issues, and therefore, many researchers have investigated laser drilling with ultra-short pulses on the basis of percussion or trepanning regime [19,20]. In spite of the positive advocation of femtosecond laser in micro-machining, it was pointed out by Dausinger et al [21] that when the pulse duration was below 10 picoseconds, a further reduction would produce no remarkable advantage for material removal, at least for metals.…”
Section: Discussionmentioning
confidence: 99%