2017
DOI: 10.1016/j.matpr.2017.02.161
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Micromachining of Borosilicate Glass: A State of Art Review

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Cited by 25 publications
(8 citation statements)
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“…Demands for machining of glass have been increasing in manufacture fields [1,2]. Quartz glass is a typical hard and brittle material that is difficult to process and has excellent performance in optical instruments, semiconductors, and precision equipment [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…Demands for machining of glass have been increasing in manufacture fields [1,2]. Quartz glass is a typical hard and brittle material that is difficult to process and has excellent performance in optical instruments, semiconductors, and precision equipment [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…The glass having the highest hard and brittle material therefore it is a challenging task to process it with both traditional and modern manufacturing processes. From the family of glass sodalime glass is mostly used in industries for different purposes due to its excellent properties such as high chemical resistivity, corrosion resistance, biocompatibility, high specific strength, heat-resisting capacity, excellent mechanical hardness, excellent anodic bonding, high electrical resistivity and good surface quality [2][3][4]. The glass material can be efficiently machined by using electrochemical discharge machining process (ECDM), Electro chemical discharge machining (ECDM) is micro machining hybrid process where the machining is done with the both thermal sparking and chemical etching phenomena.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore it is widely used in various engineering and biomedical fields. The various applications as microelectromechanical systems, mechanical inertial sensors, micro fabricated devices like oxide fuel cells and micro-pumps, optical telecommunication, optical industries for spectacle lenses and optical instruments, miniaturization of microfluidic devices for chemical and biological micro total analysis systems [8,9].…”
Section: Introductionmentioning
confidence: 99%