Micromachined ultrasonic transducers (MUTs)

Ladabaum, I.; Khuri‐Yakub, Butrus T.; Spoliansky, Dimitri; Haller, M.I.

doi:10.1109/ultsym.1995.495627

Cited by 29 publications

(21 citation statements)

References 8 publications

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“…Such modeling is very useful for single capacitive microphones with very thin membranes and for airborne applications only, because air presents very light acoustic loading. Capacitive micro-machined ultrasonic transducers (cMUTs), which belong to this class, emerged in the last decade as a result of developments in microfabrication technology [4], [5]. The very promising potential of these devices attracted attention to the modeling of these devices under different acoustic loading conditions.…”

mentioning

confidence: 99%

Parametric linear modeling of circular cMUT membranes in vacuum

Köymen

Senlik

Atalar

et al. 2007

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Abstract-We present a lumped element parametric model for the clamped circular membrane of a capacitive micromachined ultrasonic transducer (cMUT). The model incorporates an electrical port and two sets of acoustic ports, through which the cMUT couples to the medium. The modeling approach is based on matching a lumped element model and the mechanical impedance of the cMUT membrane at the resonance frequencies in vacuum. Very good agreement between finite element simulation results and model impedance is obtained. Equivalent circuit model parameters can be found from material properties and membrane dimensions without a need for finite element simulation.

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mentioning

confidence: 99%

Parametric linear modeling of circular cMUT membranes in vacuum

Köymen

Senlik

Atalar

et al. 2007

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…A major difference is, therefore, the fact that the CMUT element is less bulky than its piezoelectric counterpart. As a result, the CMUT generally has a higher bandwidth due to its relatively smaller inertia [6]. Other advantages of the CMUT include higher axial resolution, excellent thermal properties and the potential ease of compatibility with ASICs.…”

Section: B Capacitive Micromachined Ultrasonic Transducers (Cmuts)mentioning

confidence: 99%

Transmitting performance evaluation of ASICs for CMUT-based portable ultrasound scanners

Muntal

Diederichsen

Jørgensen

et al. 2017

2017 IEEE International Ultrasonics Symposium (IUS)

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Abstract-Portable ultrasound scanners (PUS) have, in recent years, raised a lot of attention, as they can potentially overcome some of the limitations of static scanners. However, PUS have a lot of design limitations including size and power consumption. These restrictions can compromise the image quality of the scanner. In order to overcome these restrictions, application specific integrated circuits (ASICs) are needed to implement the electronics. In this work, a comparative study of the transmitting performance of a capacitive micromachined ultrasonic transducer (CMUT) driven by a commercial generic ultrasound transmitter and an ASIC optimized for CMUT-based PUS is presented. A single CMUT element is pulsed with a 1% duty cycle at a frequency of 5 MHz. The DC bias voltage is 80 V and the pulsing voltage is 20 V. The acoustic performance is assessed by comparing the ultrasonic signals measured with a hydrophone both in the time and frequency domains. The difference in normalized signal amplitude evaluated at the center frequency of the CMUT is −1.9 dB and the measured bandwidth is equivalent. The ASIC consumes only 1.3% of the total power consumption used by the commercial transmitter.

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“…Following the method of multiple scales (MMS) [22,23], we seek a third-order approximate solution of Equation (2) in the form…”

Section: Primary Resonance Of the First Modementioning

confidence: 99%

“…Circular microplates are commonly electrically actuated in capacitive micromachined ultrasonic transducers (CMUTs) in both air [1][2][3][4][5][6][7][8][9] and liquids [4,[10][11][12]. The circular microplate is typically composed of a single silicon crystal or silicon nitride and is suspended above a heavily doped silicon bulk material.…”

Section: Introductionmentioning

confidence: 99%

“…When a bias voltage is applied between a deposited conductive material (the top electrode) on the microplate and the bulk base (the bottom electrode), the attractive electrostatic forces cause the microplate to deflect downward. If a small alternating voltage is added to the bias voltage, then relatively large displacements can be created when the frequency is near resonance, causing significant sound generation [2]. The CMUT converts electrical energy into mechanical energy and vice versa [9], and a good design requires a large displacement from the bias voltage for efficient energy coupling between the circular microplate and the air [1].…”

Section: Introductionmentioning

confidence: 99%

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Primary resonance excitation of electrically actuated clamped circular plates

Vogl

Nayfeh

2006

Nonlinear Dyn

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We investigate the response of an electrically actuated clamped circular plate to a primary resonance excitation of its first axisymmetric mode using an analytical reduced-order model (macromodel). We discuss the influence of the number of modes retained in the discretization on the predicted solutions. The reduced-order model, which is a system of coupled nonlinear ordinary-differential equations, accounts for general residual stress and strain hardening and allows for general material and geometric design variables. Our reduced-order model is robust up to the pull-in instability and is general enough to be an effective design tool for capacitive micromachined ultrasonic transducers.

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Micromachined ultrasonic transducers (MUTs)

Cited by 29 publications

References 8 publications

Parametric linear modeling of circular cMUT membranes in vacuum

Parametric linear modeling of circular cMUT membranes in vacuum

Transmitting performance evaluation of ASICs for CMUT-based portable ultrasound scanners

Primary resonance excitation of electrically actuated clamped circular plates

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