Micromachined Thin-Film Mirror Array for Reflective Light Modulation

Kim, Sung Hoon; Hwang, Kyu-Ho; Choi, Yong-Sung; Min, Yo‐Sep; Bae, Jungmok

doi:10.1016/s0007-8506(07)60864-6

Cited by 11 publications

(2 citation statements)

References 2 publications

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“…The technology to give functionality to a miniature product was reviewed by Alting et al (2) as micro engineering. They briefly displayed the relationships between miniature products (e.g., accelerometers (3) and micro mirrors (4) ) and their processing methods in well-organized tables, and made comments on the technological developments for micro products in mechanical processes (microcutting, microgrinding and ultrasonic machining), thermal processes (laser beam machining, iron and electron beam machining and micro-EDM), replication processes (microforming processes and microinjection molding), MEMS processes, and LIGA. However, further development of processing technologies is aspired to make a breakthrough on unsolved or newly-exposed technical difficulties.…”

Section: Introductionmentioning

confidence: 99%

Single Point Micro Incremental Forming of Miniature Shell Structures

Sekine

Obikawa

2010

JAMDSM

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This study focuses on single point micro incremental forming (SPMIF) applied to the forming of miniature shell products in meso-scale. For this study, a desk-top type of CNC forming machine was newly constructed as an experimental apparatus. A thin aluminum foil with a thickness of 12 μm and a thin round-tip bar with a radius of 100 μm were utilized as a blank and a forming tool, respectively. Some fundamental and complex shell structures were formed for investigating the characteristics of the SPMIF process without using any die and backing plate. The analysis of contact region in forming polygonal pyramids confirmed that fracture on an edge of a polygonal pyramid, which determined the forming limit of SPMIF, was strongly affected by the size of re-contact area. Through the SPMIF process established in this study, complex shell structures were accomplished with elaborate tool paths.

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Section: Introductionmentioning

confidence: 99%

Single Point Micro Incremental Forming of Miniature Shell Structures

Sekine

Obikawa

2010

JAMDSM

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“…The inevitable pulse width modulation control of on/off mirrors for gray scale control requires very sophisticated and expensive driving circuitry. The Thin-Film Micromirror Array (TMA) [3][4][5][6] is a new kind of reflective-type SLM based on micromachined micromirror array device. Unlike the DMD, TMA uses micromachined thin-film piezoelectric actuators to control the gray scale.…”

Section: Introductionmentioning

confidence: 99%

Thin‐Film Micromirror Array (TMA) for Cost‐Competitive Information Display Systems

Kim

Hwang

Koo

1999

Symp Digest of Tech Papers

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The Thin‐film Micromirror Array (TMA) is a new reflective type spatial light modulator fabricated with the optical microelectromechanical system (MEMS) technology. A working projector prototype of 5,400 true ANSI lumen was presented at the Asian Display 1998 with three VGA format TMA modules and a 1 kW Xenon lamp. The prototype showed the optical efficiency of 22%, which was the highest optical efficiency among all the reflective and transmissive light modulators in the world. For the commercial projectors, XGA f mat TMA is under development. The size of a micromirror of VGA format TMA is 97 μm by 97 μm while the size of eaxh micromirror of XGA format TMA is 50 μm by 50 μm. Efforts have been made to maintain the optical efficiency of the XGA TMA projector same as that of the VGA TMA projector. TMA projector prototype is brighter than any competing technology projectors in the world at the same lamp power, at least three times or more. The simplicity of the underlying principle and the highest optical efficiency of TMA enables high‐brightness and cost competitive projection displays which has been a dream in the past.

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