Micromachined resonator for cavitation sensing

Peiner, Erwin; Mikuta, Reinhard; Iwert, Thomas; Fritsch, Holger; Hauptmann, P.; Fricke, Klaus; Schlachetzki, A.

doi:10.1016/s0924-4247(99)00048-5

Cited by 8 publications

(2 citation statements)

References 5 publications

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“…The measured temperature coefficient of π eff is as low as 0.1% K −1 . For more details on the fabrication process and sensor characterization we refer to earlier publications [10,11].…”

Section: Sensor Technologymentioning

confidence: 99%

Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Peiner

2002

J. Micromech. Microeng.

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Vibration analysis of axle box bearings is addressed for monitoring the condition of wagon wheel sets, which is crucial for the safety of high-speed railway traffic. We investigated the application of piezoresistive microelectromechanical silicon sensors designed for low-frequency resonant operation. Sensor fabrication using a low-cost planar technology and characterization are described. We show the feasibility of our method by vibration measurements with wheel sets of high-speed trains under the harsh conditions of railway operation leading, e.g., to intense background interference. Incipient fatigue damage could be detected on the cups of axle box bearings which were operated at constant and variable rotational speed.

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“…The measured temperature coefficient of π eff is as low as 0.1% K −1 . For more details on the fabrication process and sensor characterization we refer to earlier publications [10,11].…”

Section: Sensor Technologymentioning

confidence: 99%

Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Peiner

2002

J. Micromech. Microeng.

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“…Com o desenvolvimento das tecnologias de fabricação do silícioà partir da década de 1960 e o conhecimento de suas excelentes propriedades mecânicas, aliadasà versatilidade elétrica e térmica (Bao and Middelhoek, 2000), sistemas microeletromecânicos -também denominados MEMS, do termo em inglês Microelectromechanical Systems -popularizaram-se nas décadas seguintes, tornandose alternativas viáveis de sensores e atuadores em váriaś areas. Na análise espectral, conforme observado em diver-sos trabalhos a partir do final da década de 1990 (Peiner et al, 1999), ao utilizar microacelerômetros, pode-se eliminar a necessidade de aplicação da FFT ao amplificar o sinal de vibração em uma pequena banda ao redor de sua frequência de ressonância (Scheibner et al, 2005).…”

Section: Introductionunclassified

Evolução Diferencial para eliminação de ruído em Analisadores de Espectro em Tempo Real baseados em MEMS

Marinho

Giesbrecht

Fruett

2019

Anais Do 14º Simpósio Brasileiro De Automação Inteligente

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The Design and Analysis of Shock Resistant Microsystems (MEMS)

Srikar

Senturia

2001

Transducers ’01 Eurosensors XV

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SUMMARYAs a flrst step towards fonnulating guidelines for the design of dynamically reliable MEMS, we analyze the nature of the mechanical responses of shock-loaded microsystems. MEMS are modeled as microstructures supported on elastic substrates, and the shock loads are represented as pulses of acceleration applied by the package on the substrate over a flnite time duration. For typical MEMS and shock loads, the response of the substrate is closely approximated by rigid-body motion. Time-domain criteria, obtained to distinguish between the impulse, resonant, and quasi-static responses of the microstructures, correlate well with the experimentally observed behavior of shock-loaded MEMS.

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Micromachined resonator for cavitation sensing

Cited by 8 publications

References 5 publications

Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Evolução Diferencial para eliminação de ruído em Analisadores de Espectro em Tempo Real baseados em MEMS

The Design and Analysis of Shock Resistant Microsystems (MEMS)

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