2002
DOI: 10.1088/0960-1317/12/4/323
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Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Abstract: Vibration analysis of axle box bearings is addressed for monitoring the condition of wagon wheel sets, which is crucial for the safety of high-speed railway traffic. We investigated the application of piezoresistive microelectromechanical silicon sensors designed for low-frequency resonant operation. Sensor fabrication using a low-cost planar technology and characterization are described. We show the feasibility of our method by vibration measurements with wheel sets of high-speed trains under the harsh condit… Show more

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Cited by 2 publications
(1 citation statement)
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“…Sensor prototypes are realized using a bulk micromachining process based on standard photolithography, wet etching and diffusion from a spin-on-source [8]. Elaborate techniques such as epitaxy, implantation or dry etching which employ rather complex and expensive instrumentation are not required (cf [1]).…”
Section: Sensor Fabricationmentioning
confidence: 99%
“…Sensor prototypes are realized using a bulk micromachining process based on standard photolithography, wet etching and diffusion from a spin-on-source [8]. Elaborate techniques such as epitaxy, implantation or dry etching which employ rather complex and expensive instrumentation are not required (cf [1]).…”
Section: Sensor Fabricationmentioning
confidence: 99%