Micromachined magnetic actuators using electroplated Permalloy

Liu, Chang; Yue, Yi

doi:10.1109/20.764895

Cited by 62 publications

(8 citation statements)

References 25 publications

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“…The magnetic field generated by the solenoid is shown in figure 3(b), which shows an example of magnetic field with the south pole at the top and north pole at the bottom of the solenoid. Based on the anisotropy theory [36,37], an in-plane magnetization is formed in the trapezoidal nickel film, which rotate each trapezoidal plate downwards about the anchoring spring. Under the magnetic field, not only the trapezoidal plate, but also the central ring structure is magnetized.…”

Section: Driving Principlementioning

confidence: 99%

A translation micromirror with large quasi-static displacement and high surface quality

He¹

2016

J. Micromech. Microeng.

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A large displacement with high surface quality translation micromirror is presented. The micromirror consists of a magnetic actuator and a mirror plate. The actuator and the mirror plate are fabricated separately using two processes and then bonded together. The actuator consists of a moving film which is a 20 µm thick nickel film fabricated by MetalMUMPs and a solenoid located underneath the moving film. The moving film is designed to curve up through the residual stress gradient in the nickel film and a curve-up mechanism which includes four trapezoidal plates and anchoring springs. The mirror plate is simply diced from a polished silicon wafer and coated with a metal thin film. The mirror plate is bonded onto the central ring of the moving film. A solenoid attracts the moving film along with the mirror plate downwards to realize translation. A quasi-static displacement of 123 µm is achieved at a driving current of 400 mA. A high mirror surface quality is realized, e.g. 15.6 m of curvature radius and 2 nm surface roughness.

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Section: Driving Principlementioning

confidence: 99%

A translation micromirror with large quasi-static displacement and high surface quality

He¹

2016

J. Micromech. Microeng.

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“…The proposed tunable metamaterial has field induced nonlinearity, which is possible to realize using current micromachining technologies. Magnetic actuation of single end fixed cantilevers in micromachined devices has been studied and demonstrated before [77,78]. In additional to translation, the magneto-mechanical actuators can be used to rotate the micromachined structures [79,80].…”

Section: Magneto-mechanical Tuningmentioning

confidence: 99%

Micromachined tunable metamaterials: a review

Liu¹,

Zhu²,

Tsai³

et al. 2012

J. Opt.

154

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This paper reviews micromachined tunable metamaterials, whereby the tuning capabilities are based on the mechanical reconfiguration of the lattice and/or the metamaterial element geometry. The primary focus of this review is the feasibility of the realization of micromachined tunable metamaterials via structure reconfiguration and the current state of the art in the fabrication technologies of structurally reconfigurable metamaterial elements. The micromachined reconfigurable microstructures not only offer a new tuning method for metamaterials without being limited by the nonlinearity of constituent materials, but also enable a new paradigm of reconfigurable metamaterial-based devices with mechanical actuations. With recent development in nanomachining technology, it is possible to develop structurally reconfigurable metamaterials with faster tuning speed, higher density of integration and more flexible choice of the working frequencies.

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“…Microcantilevers with Permalloy coatings have been used as micro actuators. The behavior of such actuators in a nonuniform magnetic field was modeled in [7], [8]. The flexural magnetic actuator literature has focused largely on physical modeling and generally does not consider control even though the resulting actuator may be unstable in some portion of the region of operation.…”

Section: Introductionmentioning

confidence: 99%

Preliminary design of a model-based position controller for magnetic microfibers

Karve

Cheng

Groff

2013

52nd IEEE Conference on Decision and Control

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Polymer fibers embedded with paramagnetic particles bend when placed in a magnetic field. The fiber can be manipulated by varying the coil current in an electromagnet. The operating range of the fiber is divided into one region with stable equilibria and one region with unstable equilibria. In this paper, fiber dynamics are modeled as a rigid bar. This model is used to develop a nonlinear controller for the position of the fiber over the whole operating range. An experimental platform for sensing and controlling fiber position was developed. The controller is tested experimentally and results are presented. The results show that the controller can control the position of the fiber in the unstable region despite model uncertainty.

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Micromachined magnetic actuators using electroplated Permalloy

Cited by 62 publications

References 25 publications

A translation micromirror with large quasi-static displacement and high surface quality

A translation micromirror with large quasi-static displacement and high surface quality

Micromachined tunable metamaterials: a review

Preliminary design of a model-based position controller for magnetic microfibers

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