Micromachined infrared detectors based on pyroelectric thin films

Muralt, Paul

doi:10.1088/0034-4885/64/10/203

Cited by 265 publications

(149 citation statements)

References 104 publications

(119 reference statements)

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“…This gives rise to one of the most frequently used parameters, the area-normalized (or specific) detectivity, To appreciate typical magnitudes of the responsivity and detectivity of a pyroelectric, consider a 0.01 mm 2 lanthanummodified lead titanate (PLT) element supported on a thin ceramic membrane. 11 The maximum voltage responsivity was calculated to be about 40 000 V/W at a modulation frequency of 1 Hz. The maximum current responsivity was 50 mA/W and the maximum D* was 6.4 × 10 8 cm Hz 1/2 /W at 5 Hz.…”

Section: Box 2 Characterization Of Pyroelectric Elementsmentioning

confidence: 99%

Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool

2005

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Section: Box 2 Characterization Of Pyroelectric Elementsmentioning

confidence: 99%

Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool

2005

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“…One mode operates at a temperature below (but typically near) the Curie temperature T C of the ferroelectric where the variation in the spontaneous polarization as a function of temperature is large. In the dielectric bolometer mode, one works slightly above T C in the paraelectric state of the ferroelectric and with an applied bias field to induce polarization [5][6][7][8][9]. In either case, it is required that the ferroelectric is deposited in a thin film form on an IC compatible substrate.…”

Section: Application Of Electrothermal Properties Of Ferroelectricsmentioning

confidence: 99%

Electrothermal properties of perovskite ferroelectric films

et al. 2009

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The electrothermal (electrocaloric and pyroelectric) properties of ferroelectric thin films have many applications in active solid-state cooling and infrared sensing devices. It has been shown experimentally that some thin-film ferroelectrics can produce much larger electrothermal responses than their bulk counterparts. In this work, the electrothermal properties of bulk polar dielectric (ferroelectric and incipient ferroelectric) materials and thin films have been computed using a thermodynamic methodology and the effects of electrical, thermal and mechanical boundary conditions have been illustrated. In particular, the sensitivity of pyroelectric and electrocaloric response to bias and driving fields, lateral clamping and misfit strain, thermal stresses and composition have been demonstrated. The computations show that the electrothermal behavior of ferroelectric materials for practical cooling devices depends on a complex interplay of several related sets of physical phenomena. These include the nature of the ferroelectric transition, the particular dependence of the equilibrium and transport properties on electric field and mechanical boundary constraints, and the orientation and thermal expansion coefficients of the thin film and substrate materials. The combined results provide insights concerning how the composition and orientation of the thin film material, the choice of substrate, the deposition/annealing temperature, and the electrode configuration can be used to optimize the electrothermal properties for particular applications.

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“…2,3 Dielectrics whose structures possess both a unique axis of symmetry and lack a center of symmetry (i.e., that are "polar") display a spontaneous polarization (PS) and will exhibit a PE due to temperature-induced changes in PS.…”

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Next-generation electrocaloric and pyroelectric materials for solid-state electrothermal energy interconversion

Mantese²,

et al. 2014

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Thin-film electrocaloric and pyroelectric electrothermal interconversion energy sources have recently emerged as viable means for primary and auxiliary solid-state cooling and power generation. Two significant advances have facilitated this development: (1) the formation of high-quality polymeric and ceramic thin films with figures of merit that project system-level performance as a large percentage of Carnot efficiency and (2) the ability of these newer materials to support larger electric fields, thereby permitting operation at higher voltages.This makes the power electronic architectures more favorable for thermal to electric interconversion. Current research targets to adequately address commercial device needs include reduction of parasitic losses, increases in mechanical robustness, and the ability to form nearly free-standing elements with thicknesses in the range of 1-10 m. This article describes the current state-ofthe-art materials, thermodynamic cycles, and device losses and points toward potential lines of research that would lead to substantially better figures of merit for electrothermal interconversion.Keywords: Material type-polymer (143), Material type-ceramic (121), Functionality-energy generation (189), , Material form-film (231), Transport-ferroelectricity (288) Fundamentals of ferroelectrics materials: Pyroelectrics and ElectrocaloricsIt has long been known that, when heated, materials such as the borosilicate tourmaline have the ability to attract objects such as pieces of feather, pollen, and cloth. This is due to the appearance of a surface charge in response to a temperature change. The history of this phenomenon, which is known as the pyroelectric effect (PE), was charted by Lang, 1 from its first description by Dielectrics whose structures possess both a unique axis of symmetry and lack a center of symmetry (i.e., that are "polar") display a spontaneous polarization (PS) and will exhibit a PE due to temperature-induced changes in PS. MRS BulletinThese variations in PS result in uncompensated charge appearing along surfaces that have a component normal to the polar axis, generating a net voltage across the dielectric. If the surfaces are provided with electrodes that are connected through an external circuit, this surface charge can cause a current to flow, potentially resulting in useful work. In the absence of an applied electric field or applied stress, the pyroelectric coefficient p(T) is defined as the rate of change of spontaneous polarization with temperature such that p(T) = dPS/dT. If electrodes are applied to the major faces perpendicular to the polar axis, as illustrated in Figure 1a, and the temperature is changed at a rate dT/dt, then the short-circuitThe converse of the pyroelectric effect is called the electrocaloric effect (ECE; see Figure 1b). Here, an electric field applied to a polar dielectric causes a change in temperature in the material. Conceptually, the ECE is somewhat harder to grasp than the PE, but it is analogous to the changes in temperature and en...

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Micromachined infrared detectors based on pyroelectric thin films

Cited by 265 publications

References 104 publications

Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool

Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool

Electrothermal properties of perovskite ferroelectric films

Next-generation electrocaloric and pyroelectric materials for solid-state electrothermal energy interconversion

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