Micromachined flat-walled valveless diffuser pumps

Olsson, Anders; Enoksson, Peter; Stemme, Göran; Stemme, E.

doi:10.1109/84.585794

Cited by 177 publications

(132 citation statements)

References 10 publications

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“…Although the walls of the PDMS channels made by this method were not perfectly smooth in comparison to one from a master made by traditional micromachining techniques (e.g. LIGA, DRIE) [25,28], its effects on fluid flow under laminar conditions should be insignificant.…”

Section: Fluidics Membrane and Prototype Cartridgementioning

confidence: 91%

Hybrid macro–micro fluidics system for a chip-based biosensor

Tamanaha¹,

Whitman

Colton

2002

J. Micromech. Microeng.

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We describe the engineering of a hybrid fluidics platform for a chip-based biosensor system that combines high-performance microfluidics components with powerful, yet compact, millimeter-scale pump and valve actuators. The microfluidics system includes channels, valveless diffuser-based pumps, and pinch-valves that are cast into a poly(dimethylsiloxane) (PDMS) membrane and packaged along with the sensor chip into a palm-sized plastic cartridge. The microfluidics are driven by pump and valve actuators contained in an external unit (with a volume ∼30 cm 3 ) that interfaces kinematically with the PDMS microelements on the cartridge. The pump actuator is a simple-lever, flexure-hinge displacement amplifier that increases the motion of a piezoelectric stack. The valve actuators are an array of cantilevers operated by shape memory alloy wires. All components can be fabricated without the need for complex lithography or micromachining, and can be used with fluids containing micron-sized particulates. Prototypes have been modeled and tested to ensure the delivery of microliter volumes of fluid and the even dispersion of reagents over the chip sensing elements. With this hybrid approach to the fluidics system, the biochemical assay benefits from the many advantages of microfluidics yet we avoid the complexity and unknown reliability of immature microactuator technologies.

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Section: Fluidics Membrane and Prototype Cartridgementioning

confidence: 91%

Hybrid macro–micro fluidics system for a chip-based biosensor

Tamanaha¹,

Whitman

Colton

2002

J. Micromech. Microeng.

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“…In 1997, Olsson, et al [41], produced a parallel-connected valveless piezoelectric micro-pump with coneshaped tubes by using the latest technique of deep reactive ion etching (DRIE). The maximum pump pressure was 7.6 mH 2 O (74 kPa) and the maximum pump flow was 2.3 mL/ min.…”

Section: Parallel Structurementioning

confidence: 99%

Advances in Valveless Piezoelectric Pump with Cone-shaped Tubes

Zhang

Wang

Huang

2017

Chin. J. Mech. Eng.

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This paper reviews the development of valveless piezoelectric pump with cone-shaped tube chronologically, which have widely potential application in biomedicine and micro-electro-mechanical systems because of its novel principles and deduces the research direction in the future. Firstly, the history of valveless piezoelectric pumps with cone-shaped tubes is reviewed and these pumps are classified into the following types: single pump with solid structure or plane structure, and combined pump with parallel structure or series structure. Furthermore, the function of each type of cone-shaped tubes and pump structures are analyzed, and new directions of potential expansion of valveless piezoelectric pumps with cone-shaped tubes are summarized and deduced. The historical argument, which is provided by the literatures, that for a valveless piezoelectric pump with cone-shaped tubes, cone angle determines the flow resistance and the flow resistance determines the flow direction. The argument is discussed in the reviewed pumps one by one, and proved to be convincing. Finally, it is deduced that bionics is pivotal in the development of valveless piezoelectric pump with cone-shaped tubes from the perspective of evolution of biological structure. This paper summarizes the current valveless piezoelectric pumps with cone-shaped tubes and points out the future development, which may provide guidance for the research of piezoelectric actuators.

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“…Stemme [25] Gerlach et al [26] Olsson et al [11] Heschell et al [27] Olsson et al [28] and Ullmann [29]). These models are quite useful; nevertheless they are incapable of predicting the dynamic behavior of the pump.…”

Section: Analysis Of Diffuser / Nozzle Micropumpmentioning

confidence: 99%