Micromachined end-effector and techniques for directed MEMS assembly

Abstract

A micromachined end-effector along with techniques in micromanipulation for directed micro-electro-mechanical systems (MEMS) assembly is presented. A passive end-effector, fabricated in a 50 µm thick single crystal silicon (SCS) deep reactive ion etched (DRIE) process, is compared with a microgripper made with the same process. With this passive tool, pick and place assembly of MEMS components can be accomplished reliably, since the end-effector is more mechanically robust than comparable microgrippers. This end-effector can withstand an order of magnitude more force than conventional MEMS based microgrippers used for microassembly. In addition, the elimination of any actuation reduces packaging complexity and allows easier integration of sensing mechanisms for feedback control. This simplified passive end-effector with an integrated electrical contact sensor is also presented, along with assembly techniques and designs used for directed pick and place MEMS assembly. Both mechanical and electrical MEMS interconnects are demonstrated.

Low-Shock Manipulation and Testing of Micro Electro-Mechanical Systems (MEMS)

“…Another solution is to use a passive gripper, characterized by the absence of any type of direct actuation for the manipulation of the object (Tsui et al, 2004). Fig.…”

Towards cyclic fabrication systems for modular robotics and rapid manufacturing

“…Most recent research falls nicely into one category or the other. In the assembly category, researchers have demonstrated general processes of shape change through reconfiguration [11] [12] [13], stochastic assembly of random components [14] [15], prototype assembly systems for MEMS [16], and self-replication through centrally directed assembly of modular robots [17] [18] [19]. Within fabrication, two groups are developing desktop printers with the potential to replicate their constituent components [6] [7], and other groups are using rapid manufacturing machines to produce fully formed robotic devices [20] [21].…”

Out of plane motion of assembled microstructures using a single-mask SOI process

“…The passive rotation capability of the orthogripper allows the possibility of automated assembly with 3 axis manipulators with motion and accuracy requirements similar to existing high-speed wire bonders. Previous assembly systems have required more than 3 degrees of freedom [6,7].…”

“…The clamp has also been integrated with other sockets to anchor multiple legs of the same assembled structure. An interesting use of this device would be to provide mechanical stability to a part which is assembled using the connectors in [7]. …”

“…Serial pick and place with specially designed actuated micro-manipulators has been demonstrated [6,7]. After a part is picked up, it needs to be rotated by 90 o before being assembled; this is achieved using a robotic arm in these systems.…”