Micromachined Angular Rate Sensors for Automotive Applications

Neul, Reinhard; Gomez, Udo-Martin; Kehr, Kersten; Bauer, W.; Claßen, Johannes; Doring, C.; Esch, E.L.; Götz, Stefan; Hauer, Johann; Kuhlmann, Burkhard; Lang, C.; Veith, M.; Willig, R.

doi:10.1109/jsen.2006.888610

Cited by 110 publications

(35 citation statements)

References 4 publications

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“…Fig. 10 shows the fully differential structure of an active RC resonator used for the second and third electronic resonators of the system, which has the transfer function given in (3). The frequency response is plotted in Fig.…”

Section: System Level Simulationmentioning

confidence: 99%

“…In the excitation mode, the proof mass is electrostatically driven to oscillate with a constant amplitude and frequency in a fixed direction. This oscillation is usually controlled by a closed loop control system, for example, a phase-lock-loop (PLL) and automatic gain control (AGC) [3][4][5][6]. However, this loop is not the topic of this work and will not be discussed in detail here.…”

Section: Introductionmentioning

confidence: 99%

“…If a gyroscope controller is implemented in the digital domain, not only a powerful digital signal processor (DSP) is necessary, but also a high speed and high performance analog-to-digital converter (ADC). Recently, a control strategy based on a sigma-delta modulation ( M) has proven to be advantageous [3,4,10]. However, to date the control loop makes use of a low-pass M, which requires a high sampling frequency due to the relatively high mechanical resonant frequency and results in demanding requirements for the interface circuits.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

Dong

Kraft

Hedenstierna

et al. 2008

Sensors and Actuators A: Physical

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Section: System Level Simulationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

Dong

Kraft

Hedenstierna

et al. 2008

Sensors and Actuators A: Physical

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“…In MEMS non-resonant vibratory gyroscopes (Clark et al 1996;Kourepenis et al 1998;Xie and Fedder 2004;Neul 2007), the resonator is existing, but it is not working in its resonant state, and it is applied to measure the amplitude of the displacement. In MEMS resonant vibratory gyroscopes, although it is benefits from being highly sensitive, good linearity and low noise, there are not too many units taking the research in resonant vibratory gyroscopes.…”

Section: Introductionmentioning

confidence: 99%

Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Fan

Zhang

et al. 2012

Microsyst Technol

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Dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes are studied in this paper. Firstly, a small parameter method is introduced to analyze the dynamic characteristic stability of the resonator. It is proved that geometrical parameters of the resonator have to be regulated to match corresponding stability analysis. In order to verify the rationality of the theoretical parameters design, static calibration experiment is built using a resonator sample. It is concluded from the calibrated result that the error between theory design and experiment is 0.03 %, which shows they have a good match, and the design of resonator is reasonable. Moreover, the method of small parameter perturbation is considered to analyze the input-output dynamic characteristic. Under some transformations, which make input angular velocity and output resonant frequency shift possess a good linear relationship. In order to verify the correctness of the theory analysis method, dynamic frequency output characteristic experiment is built using the resonant vibratory gyroscope sample. It is concluded from the dynamic measurement result that the correlation coefficient of output fitted curve is 99.95 %, the measured algorithm scale factor of the gyroscope sample is 0.2116, which prove theoretical analyzing approach is feasible.

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“…In mode-matched devices, the drive and sense resonant frequencies are equal allowing the output of the sensor to be increased proportional to the sense mode quality factor yielding higher sensitivities at the cost of reduced bandwidth and robustness [3]. Operation with the resonant frequencies separated by some prescribed amount, or mode-mismatched, is more common, particularly for automotive applications where robustness is critical [4], [5].…”

Section: Introductionmentioning

confidence: 99%

Micromachined gyroscope design allowing for both robust wide-bandwidth and precision mode-matched operation

2008

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This paper presents a new z-axis gyroscope design with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which, unlike the previous multi-DOF design, allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system. Experimental rate characterization of an SOI prototype in air for both robust and precision modes revealed scale factors of 0.282 and 0.690 mV/deg/s respectively. The improvement due to precision mode operation is increased to 27 times for operation in 500 mTorr reduced pressure.

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Micromachined Angular Rate Sensors for Automotive Applications

Cited by 110 publications

References 4 publications

Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator

Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Micromachined gyroscope design allowing for both robust wide-bandwidth and precision mode-matched operation

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