Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Li, Yan; Fan, Shangchun; Zhang, Guo; Li, Jing; Cao, Lu

doi:10.1007/s00542-012-1492-2

Cited by 9 publications

(4 citation statements)

References 8 publications

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“…Compared with the conventional amplitude modulation detection method, this detection method has high accuracy, a large dynamic range, low noise, and low power consumption. In 2002, the University of California, Berkeley, designed the first integrated micromechanical gyroscope with direct output frequency detection [ 14 , 15 ]; the research on resonant gyroscopes with direct output frequency has been continuously improved since then [ 16 , 17 ].…”

Section: The Operating Principlementioning

confidence: 99%

An Ultrahigh-Sensitivity Graphene Resonant Gyroscope

Zhang

Fan

2021

Nanomaterials

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In this study, a graphene beam was selected as a sensing element and used to form a graphene resonant gyroscope structure with direct frequency output and ultrahigh sensitivity. The structure of the graphene resonator gyroscope was simulated using the ANSYS finite element software, and the influence of the length, width, and thickness of the graphene resonant beam on the angular velocity sensitivity was studied. The simulation results show that the resonant frequency of the graphene resonant beam decreased with increasing the beam length and thickness, while the width had a negligible effect. The fundamental frequency of the designed graphene resonator gyroscope was more than 20 MHz, and the sensitivity of the angular velocity was able to reach 22,990 Hz/°/h. This work is of great significance for applications in environments that require high sensitivity to extremely weak angular velocity variation.

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Section: The Operating Principlementioning

confidence: 99%

An Ultrahigh-Sensitivity Graphene Resonant Gyroscope

Zhang

Fan

2021

Nanomaterials

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“…As the core device in measurements, silicon micro-resonant sensors play an important role in atmospheric parameter measurement system, aerospace ground test system, industrial automation production, consumer electronic products, etc. [1][2][3][4][5]. These sensors are featured by a resonant state of sensitive elements modulated by measurement, and by direct output of frequency signals to realize stable and repeatable measurements [6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review

Fan

Zhao

et al. 2022

Micromachines

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Graphene nano-electromechanical resonant sensors have wide application in areas such as seawater desalination, new energy, biotechnology, and aerospace due to their small size, light weight, and high sensitivity and resolution. This review first introduces the physical and chemical properties of graphene and the research progress of four preparation processes of graphene. Next, the principle prototype of graphene resonators is analyzed, and three main methods for analyzing the vibration characteristics of a graphene resonant sheet are described: molecular structural mechanics, non-local elastic theory and molecular dynamics. Then, this paper reviews research on graphene resonator preparation, discussing the working mechanism and research status of the development of graphene resonant mass sensors, pressure sensors and inertial sensors. Finally, the difficulties in developing graphene nano-electromechanical resonant sensors are outlined and the future trend of these sensors is described.

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“…Equating the resonator to a single resonant beam is an effective way to study the dynamic characteristics of the resonator in resonant sensors. Our previous work has established a dynamic resonant beam model and analyzed its dynamic characteristics [ 31 ]. In addition, the stability analysis method and vibration excitation parameter characteristics have been proposed based on a single resonant beam model [ 32 , 33 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

Jin

Zhao

et al. 2021

Micromachines

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This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts: beam I, beam II, and beam III. Using Hamilton’s principle, the undamped dynamic control equation and the ordinary differential dynamic equation of the resonant beam are obtained. Moreover, the structural parameters of the accelerometer are designed and optimized by using resonator mode and frequency analysis, then using finite element simulation to verify it. Finally, 1 g acceleration tumbling experiments are built to verify the feasibility of the proposed design and optimization method. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 98 Hz/g, a resolution of 0.917 mg, and a bias stability of 1.323 mg/h. The research findings suggest that according to the resonator mode and frequency analysis, the values of the resonator structural parameters are determined so that the working mode of the resonator is far away from the interference mode and avoids resonance points effectively. The research results are expected to be beneficial for a practical resonant sensor design.

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Study of dynamic characteristics of resonators for MEMS resonant vibratory gyroscopes

Cited by 9 publications

References 8 publications

An Ultrahigh-Sensitivity Graphene Resonant Gyroscope

An Ultrahigh-Sensitivity Graphene Resonant Gyroscope

Research Progress of Graphene Nano-Electromechanical Resonant Sensors—A Review

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

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