Micromachined accelerometer based on convection heat transfer

Leung, Albert M.; Jones, J.C.; Czyzewska, E.; Chen, J.; Woods, Brian

doi:10.1109/memsys.1998.659830

Cited by 90 publications

(56 citation statements)

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“…2 deforms, producing a temperature difference between the detectors DT D . This temperature difference has been found to be proportional to the Grashof number Gr [1] for DT D ( (T H -T A ):…”

Section: Convective Accelerometer Modelingmentioning

confidence: 94%

“…Many studies report the design and optimization of openloop convective accelerometers [1][2][3][4][5][6][7][8][9][10] but very few of them address the conditioning electronics as a solution to improve the system overall performance. In most of the previous works, an open-loop and continuous time read-out circuit is used on the basis of a simple instrumentation amplifier.…”

Section: Introductionmentioning

confidence: 99%

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Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Leman

Mailly

Latorre

et al. 2009

Analog Integr Circ Sig Process

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This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal properties of the sensor, a first order sigma-delta modulator is built. This ''electro-physical'' modulator realizes an analog-to-digital conversion of the acceleration signal. Besides, the feedback mode of operation improves the sensor overall performance.

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Section: Convective Accelerometer Modelingmentioning

confidence: 94%

Section: Introductionmentioning

confidence: 99%

Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Leman

Mailly

Latorre

et al. 2009

Analog Integr Circ Sig Process

View full text Add to dashboard Cite

show abstract

“…Under the influence of an acceleration Γ, the temperature profile shifts and the balance is modified creating a temperature difference on the detectors equal to δT, proportional to the applied acceleration, giving an equivalent sensitivity G = δT/Γ (°C/g). All studies previously done [5,6] on this kind of sensor have allowed understanding the evolution of sensitivity in relation to some parameters, such as the cavity volume, the detectors geometrical design or the gas nature, but very few of them have been done on the dynamic behavior. Leung and coworkers have measured a −3 dB bandwidth of 20 Hz with a classical configuration of a cavity filled with gas [3].…”

Section: Open Accessmentioning

confidence: 99%

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

et al. 2011

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Abstract:In the present work, the design and the environmental conditions of a micromachined thermal accelerometer, based on convection effect, are discussed and studied in order to understand the behavior of the frequency response evolution of the sensor. It has been theoretically and experimentally studied with different detector widths, pressure and gas nature. Although this type of sensor has already been intensively examined, little information concerning the frequency response modeling is currently available and very few experimental results about the frequency response are reported in the literature. In some particular conditions, our measurements show a cut-off frequency at −3 dB greater than 200 Hz. By using simple cylindrical and planar models of the thermal accelerometer and an equivalent electrical circuit, a good agreement with the experimental results has been demonstrated.

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“…Traditional MEMS inertia sensors employ large proof mass attached to springs which yield resonant frequency of few kilohertz [1,2]. A variety of transduction mechanism has been used for sensing the proof mass displacement, which includes piezoresistive [3], tunneling [4], thermal [5], capacitive [6], and optical [7]. Optically enabled micro-accelerometers can offer high resolution detection and improve sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Micro-opto-mechanical disk for inertia sensing

Dushaq¹,

Muluget²,

Rasras³

2016

Photonic Sens

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An optically enabled z-axis micro-disk inertia sensor is presented, which consists of a disk-shaped proof mass integrated on top of an optical waveguide. Numerical simulations show that the optical power of laser beam propagating in a narrow silicon nitride (Si 3 N 4 ) waveguide located under the disk is attenuated in response to the vertical movement of the micro-disk. The high leakage power of the TM mode can effectively be used to detect a dynamic range of 1 g -10 g (g=9.8 m/s 2 ). At lest, the waveguide is kept at a nominal gap of 1 m from the proof mass. It is adiabatically tapered to a narrow dimension of W×H = 350×220 nm 2 in a region where the optical mode is intended to interact with the proof mass. Furthermore, the bottom cladding is completely etched away to suspend the waveguide and improve the optical interaction with the proof mass. The proposed optical inertia sensor has a high sensitivity of 3 dB/g when a 50 m-long waveguide is used (normalized sensitivity 0.5 dB/m 2 ) for the vertical movement detection.

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Micromachined accelerometer based on convection heat transfer

Cited by 90 publications

References 0 publications

Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

Micro-opto-mechanical disk for inertia sensing

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