Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning

Lim, Chin Seong; Hong, Ming Hui; Lin, Yu‐Sheng; Xie, Qing; Luk’yanchuk, Boris; Kumar, A. Senthil; Rahman, Mustafizur

doi:10.1063/1.2374809

Cited by 80 publications

(42 citation statements)

References 16 publications

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“…Although its wavelength is in the near IR range, it is one of the very promising tools to fabricate nanostructures due to the multi-photon absorption effect. The results of this work show that the optical diffraction limit can be overcome by using a MLA with small lens diameter in combination with appropriate choice of laser power Lim et al 2006). …”

Section: Introductionmentioning

confidence: 86%

Laser Nano-Patterning for Large Area Nanostructure Fabrication

Tan

Hong

2008

International Journal of Optomechatronics

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The laser nano-patterning technique described here makes use of laser irradiation through a transparent microlens array to generate nano-patterns over a large area in a short time. A femtosecond laser and an excimer laser were used to pattern phase change and photoresist thin films. Due to the ultra-short pulse duration of the femtosecond laser (800 nm/100 fs) and multi-photon absorption effect, nano-patterns down to about 50 nm in feature size were created in the phase change films by laser irradiation at an optimized laser power. By using a 248 nm/23 ns KrF excimer laser, feature sizes of approximately 80 nm can be obtained on a photoresist surface, which implies a high resolution of one third of the laser wavelength. Such small feature size shows that it is possible for the laser nano-patterning technique to overcome the optical diffraction limit for large area surface nano-structuring.

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Section: Introductionmentioning

confidence: 86%

Laser Nano-Patterning for Large Area Nanostructure Fabrication

Tan

Hong

2008

International Journal of Optomechatronics

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“…The periodicity of nanostructure array depends greatly on spacing between adjacent micro-lenses. 33,34 It had been shown that plasmonic nanolithography can reach down to 12 nm feature size. However, that techniques is limited to periodic structures.…”

Section: Discussionmentioning

confidence: 99%

“…32,33 The technique utilizes an array of focal points from a laser beam that also enables parallel patterning. 33,34 However, it requires micro-lens array fabrication prior to the fabrication of the intended nanostructures. The periodicity of nanostructure array depends greatly on spacing between adjacent micro-lenses.…”

Section: Discussionmentioning

confidence: 99%

Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

et al. 2013

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Hamilton, Douglas W.; and Mittler, Silvia, "Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies" (2013 Abstract. The fabrication details to form large area systematically changing multishape nanoscale structures on a chip by laser interference lithography (LIL) are described. The feasibility of fabricating different geometries including dots, ellipses, holes, and elliptical holes in both x-and y-directions on a single substrate is shown by implementing a Lloyd's interferometer. The fabricated structures at different substrate positions with respect to exposure time, exposure angle and associated light intensity profile are analyzed. Experimental details related to the fabrication of symmetric and biaxial periodic nanostructures on photoresist, silicon surfaces, and ion milled glass substrates are presented. Primary rat calvarial osteoblasts were grown on ion-milled glass substrates with nanotopography with a periodicity of 1200 nm. Fluorescent microscopy revealed that cells formed adhesions sites coincident with the nanotopography after 24 h of growth on the substrates. The results suggest that laser LIL is an easy and inexpensive method to fabricate systematically changing nanostructures for cell adhesion studies. The effect of the different periodicities and transition structures can be studied on a single substrate to reduce the number of samples significantly.

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“…The application of nanostructures could be largely enhanced once nanostructures are precisely characterized with a new method of fractal theory (as shown in Figure 1) [13][14][15]. Figure 1 The surface of different nano-sized dimensional structure characteristics on the same substrate Nowadays, most of nanodevices need to be made into a finished product to measure the specific surface area of them [16][17][18]. In this paper, we propose a method of measurement that the nanodevices can be measured by semi-finished products [19].…”

Section: Introductionmentioning

confidence: 99%

Quantitative Valuation Analysis of Surface Area of Low-dimensional Nanomaterials Based on Sensors

Zou¹,

Mo²,

Li³

et al. 2017

2017 6th International Conference on Advanced Materials and Computer Science (ICAMCS 2017)

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Abstract. In this paper, a general method of producing zero-dimensional (0-D) and onedimensional (1-D) nano-structures by adjusting only one parameter in the process of production is investigated. To further study the result of small-scale effects, a quantitative characterization for the specific surface area of 1-D nanostructure is proposed. And the characterization method could be integrated into the nano-systems to reflect useful parameters for the analysis of nanomaterials. These two methods mentioned above could enhance nano-fabrication in volume productions, as well as predict the properties of nanodevices in years to come. This means, to some extent, would exert an unquestionably positive impact on manufacturing of nanomaterials and nanodevices.

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Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning

Cited by 80 publications

References 16 publications

Laser Nano-Patterning for Large Area Nanostructure Fabrication

Laser Nano-Patterning for Large Area Nanostructure Fabrication

Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

Quantitative Valuation Analysis of Surface Area of Low-dimensional Nanomaterials Based on Sensors

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