2013
DOI: 10.1117/1.jbo.18.3.035002
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Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies

Abstract: Hamilton, Douglas W.; and Mittler, Silvia, "Large area periodic, systematically changing, multishape nanostructures by laser interference lithography and cell response to these topographies" (2013 Abstract. The fabrication details to form large area systematically changing multishape nanoscale structures on a chip by laser interference lithography (LIL) are described. The feasibility of fabricating different geometries including dots, ellipses, holes, and elliptical holes in both x-and y-directions on a single… Show more

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Cited by 25 publications
(19 citation statements)
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References 34 publications
(45 reference statements)
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“…In order to test our simulation software and photoresist nanofiber production, we fabricated single and double exposed structures similar to the previously demonstrated structures by Ertorer et al 30 Figure 3(a) illustrates an electron microscopy image of a single exposure sample and Fig. 3(b) shows the corresponding simulation.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…In order to test our simulation software and photoresist nanofiber production, we fabricated single and double exposed structures similar to the previously demonstrated structures by Ertorer et al 30 Figure 3(a) illustrates an electron microscopy image of a single exposure sample and Fig. 3(b) shows the corresponding simulation.…”
Section: Resultsmentioning
confidence: 99%
“…30 show that by increasing the number of exposures and varying exposure times, a wide variety of symmetric patterns with very fine structures and sophisticated geometry can be created. 30 show that by increasing the number of exposures and varying exposure times, a wide variety of symmetric patterns with very fine structures and sophisticated geometry can be created.…”
Section: Resultsmentioning
confidence: 99%
“…LIL is also a flexible method capable of producing various sub-wavelength fringe and dot structures in the cases of two-, three-and four-beam laser interference [3][4][5][6][7][8]. Recently, researchers reported that a wide variety of applications were achieved by LIL.…”
Section: Introductionmentioning
confidence: 99%
“…One way to overcome these problems while preserving high reproducibility and versatility is the use of lithographic approaches. [4,6,7,9,23] However, they are generally multistep processes that are costly and time consuming. [24] A different approach that has been recently proposed and successfully applied to graphene is the combination of ultrashort laser pulses with a digital micromirror device.…”
Section: Introductionmentioning
confidence: 99%