Abstract:Cost and power consumption are key factors to the spreading of microsystems into the everyday life tools. Fluxgate sensor based magnetometer systems still request such an improvement. This paper presents thin film sensor measured up to 20 MHz for a first device with solenoid coils wounded around cores made of thin monolayer of soft magnetic sputtered Ni 82 Fe 18 . Devices with laminated cores were measured up to 73 MHz. Frequency response higher than 100 MHz is achieved when magnetostatic coupling occurs betwe… Show more
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