Design of a Low-Power Micromachined Fluxgate Sensor Using Localized Core Saturation Method

Wu, Pei-Ming; Ahn, Chong H.

doi:10.1109/jsen.2008.917490

Cited by 15 publications

(6 citation statements)

References 19 publications

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“…The UV-LIGA 2 process enables the production of MEMS single-layer solenoids with 25 turns/mm [37]. A microfluxgate made using such a technology is reported in [38]. The sensor with a 30-electroplated permalloy core has 56 excitation turns with a total resistance of 2 and 11 sensing turns.…”

Section: A Miniature Fluxgatesmentioning

confidence: 99%

Advances in Magnetic Field Sensors

2010

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Abstract-The most important milestone in the field of magnetic sensors was when AMR sensors started to replace Hall sensors in many applications where the greater sensitivity of AMRs was an advantage. GMR and SDT sensors finally found applications. We also review the development of miniaturization of fluxgate sensors and refer briefly to SQUIDs, resonant sensors, GMIs, and magnetomechanical sensors.

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Section: A Miniature Fluxgatesmentioning

confidence: 99%

Advances in Magnetic Field Sensors

2010

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“…This technology has been employed for the realization of a micromachined fluxgate sensor (Wu & Ahn, 2008). …”

Section: Fluxgate Sensorsmentioning

confidence: 99%

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Todaro¹,

Sileo²,

Vittorio³

2012

Magnetic Sensors - Principles and Applications

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“…The current fluxgate sensors installed in fixed stations are often limited in their use because of their large size, high cost, high power consumption and the need for constant maintenance during use [ 13 , 14 , 15 , 16 ]. In addition, geomagnetic stations used for fluxgate-sensor observations occupy a large area and have other requirements concerning the surrounding electromagnetic environment.…”

Section: Introductionmentioning

confidence: 99%

Design of a Low-Cost Small-Size Fluxgate Sensor

Shen

Teng

2021

Sensors

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Traditional fluxgate sensors used in geomagnetic field observations are large, costly, power-consuming and often limited in their use. Although the size of the micro-fluxgate sensors has been significantly reduced, their performance, including indicators such as accuracy and signal-to-noise, does not meet observational requirements. To address these problems, a new race-track type probe is designed based on a magnetic core made of a Co-based amorphous ribbon. The size of this single-component probe is only Φ10 mm × 30 mm. The signal processing circuit is also optimized. The whole size of the sensor integrated with probes and data acquisition module is Φ70 mm × 100 mm. Compared with traditional fluxgate and micro-fluxgate sensors, the designed sensor is compact and provides excellent performance equal to traditional fluxgate sensors with good linearity and RMS noise of less than 0.1 nT. From operational tests, the results are in good agreement with those from a standard fluxgate magnetometer. Being more suitable for modern dense deployment of geomagnetic observations, this small-size fluxgate sensor offers promising research applications at lower costs.

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Design of a Low-Power Micromachined Fluxgate Sensor Using Localized Core Saturation Method

Cited by 15 publications

References 19 publications

Advances in Magnetic Field Sensors

Advances in Magnetic Field Sensors

Magnetic Field Sensors Based on Microelectromechanical Systems (MEMS) Technology

Design of a Low-Cost Small-Size Fluxgate Sensor

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