Microfluidics and bioMEMS in silicon

Franssila, Sami; Davis, Cristina E.; LeVasseur, Michael K.; Cao, Zhang; Yobaş, Levent

doi:10.1016/b978-0-12-817786-0.00022-0

Cited by 2 publications

(1 citation statement)

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“…In this context, the continuous improvement of silicon MEMS (microelectromechanical systems) technology [ 3 ], the progress of fluidic sample movements [ 4 ], the development of nanomaterials [ 5 ], and the effective integration of molecular biology on hybrid miniaturized systems [ 6 ] are strongly contributing to the development of a Lab-on-Chip (LoC) able to perform nucleic acid testing for a molecular diagnostic platform [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Miniaturized Silicon Lab-on-Chip for Integrated PCR and Hybridization Microarray for High Multiplexing Nucleic Acids Analysis

Ventimiglia¹,

Pesaturo

Malcolm³

et al. 2022

Biosensors

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A silicon lab-on-chip, for the detection of nucleic acids through the integrated PCR and hybridization microarray, was developed. The silicon lab-on-chip manufactured through bio-MEMS technology is composed of two PCR microreactors (each volume 11.2 µL) and a microarray-hybridization microchamber (volume 30 µL), fluidically connected by buried bypass. It contains heaters and temperature sensors for the management and control of the temperature cycles during the PCR amplification and hybridization processes. A post-silicon process based on (i) plasmo-O2 cleaning/activation, (ii) vapor phase epoxy silanization, (iii) microarray fabrication and (iv) a protein-based passivation step was developed and fully characterized. The ssDNA microarray (4 rows × 10 columns) composed of 400 spots (spot size—70 ± 12 µm; spot-to-spot distance—130 ± 13 µm) was manufactured by piezo-dispense technology. A DNA microarray probe density in the range of 1310 to 2070 probe µm−2 was observed, together with a limit of detection of about 19 target µm−2. The performances of the silicon lab-on-chip were validated by the detection of the beta-globin gene directly from human blood. Remarkable sensitivity, multiplexing analysis and specificity were demonstrated for the detection of beta-globin and mycobacterium tuberculosis sequences.

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