Microfluidic MEMS for semiconductor processing

Henning, Alex; Firch, J.S.; Harris, James M.; Dehan, E.; Cozad, Brad A.; Christel, L. A.; Fathi, Y.; Hopkins, D. A.; Lilly, L.; McCulley, W.; Weber, W.; Zdeblick, Mark J.

doi:10.1109/96.730416

Cited by 29 publications

(13 citation statements)

References 33 publications

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“…Microfabrication offers the benefits of higher performance and functionality, at lower cost, with decreased size and increased reliability. Moreover, definition and reproduction of the device shapes are achieved using photolithography techniques which fundamentally have very high precision so that it is effective to make large arrays of sensors with good uniformity [ 6 ]. In the past two decades, several research groups have demonstrated micromachined flow sensors based on various principles, including thermal transfer [ 7 ], torque transfer [ 8 ], and pressure distribution [ 9 ].…”

Section: Introductionmentioning

confidence: 99%

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

Liu

Zhu

Que

2009

Sensors

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In this paper, we present a novel micromachined hot-film flow sensor system realized by a technique using a film depositing processes and incorporating a standard printed circuit. Sensor electrodes and electronic circuits are preprinted on a flexible substrate of polyimide (PI), i.e., a flexible printed circuit board (FPCB). The sensing element, which is made of Cr/Ni/Pt with a temperature coefficient of resistance around 2,000 ppm/K, is fabricated on the FPCB by either magnetron sputtering technology or pulsed laser deposition (PLD). The sensor can be packed efficiently at high-density and integrated with signal processing circuits without additional pads. A simple fabrication process using mature technique and materials selection guarantees that the time and costs are greatly reduced. Both steady-state and transient characteristics of the sensors are experimentally tested, and the results presented to validate the effectiveness of the sensors.

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Section: Introductionmentioning

confidence: 99%

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

Liu

Zhu

Que

2009

Sensors

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“…In most cases the valve is open in the initial state and a continuous heating power has to be applied to close the valve, these valves are thus normally open. An example of a normally closed valve is given by Henning et al [19]. In general the design of these valves is much more complicated than for a normally open valve.…”

Section: Actuator Designmentioning

confidence: 99%

“…Several materials are used to form a membrane. Polymers like silicon rubber [14,1,2], parylene [2], polymide [21,3], PDMS [6,7,10,18,20], Kapton [9,8], Mylar [8] are used because of their strength and flexibility, but the silicon itself is also used as a membrane material [4,13,5,19,15,12]. In order to reduce the residual stress and generate a larger deflection a corrugated membrane can be used instead of a flat membrane [5,4,13].…”

Section: Actuator Designmentioning

confidence: 99%

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Explosive Micro-Bubble Actuator

Broek

Elwenspoek

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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Explosive Micro-Bubble Actuator proefschrift ter verkrijging van de graad van doctor aan de Universiteit Twente op gezag van de rector magnificus prof. dr. W.H.M. Zijm, volgens besluit van het College voor Promoties in het openbaar te verdedigen op vrijdag 31 oktober 2008 om 15:00 uur door Dennis Micha van den Broek geboren op 11 augustus 1979 te Vlaardingen Dit proefschrift is goedgekeurd door de promotor: prof. dr. M.C. Elwenspoek aan mijn vader Summary Samenvatting Dankwoord Chapter 1 Actuators and Bubbles A large variety of actuators can be found in literature. This chapter provides a brief overview of different actuator principles with a focus on thermo-pnuematic actuation and actuators, which utilize bubbles to provide the actuation force. The second part of this chapter will give a summary of the research on bubble nucleation and bubble dynamics under high heat-flux conditions. At the end of this chapter, an outline of this thesis is given.

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“…The key to microfluidic systems is microfabrication at low cost. The cost of microfluidic system packaging as part of MEMS packaging is still high compared to the device (Henning et al 1998). In comparison, many of the electronic circuit interconnections can be borrowed from the integrated circuit industry in an effort to obtain benefit from the existing vast body of knowledge.…”

Section: Introductionmentioning

confidence: 99%

Development of surface connectors for microfluidic systems

et al. 2004

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Microfluidic connectors play a key role in the microfluidic packaging systems. This paper presents the results of a development of a new design of polymeric surface connector for single channel connection between tube and microfluidic chip. The design was evaluated using finite element analysis, which takes into account assembly forces and stresses on components. The design offers an easy and simple connection process and is compatible with most polymeric microfluidic systems using different diameter tubes. Prototype PMMA and polycarbonate connectors have been produced for 1.6 mm diameter PEEK (polyethylethylene ketone) tube. These connectors can be connected and disconnected many times and will be suitable for many cases with special requirements. A series of performance tests, which include leakage, connection and disconnection force test, and reliability, have been conducted and to demonstrate the functionality of sealing and reached excess 1.37 MPa (200 psi.) without leakage and pulling force reached 40 N (9 lbf).

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Microfluidic MEMS for semiconductor processing

Cited by 29 publications

References 33 publications

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

Explosive Micro-Bubble Actuator

Development of surface connectors for microfluidic systems

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