A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

Liu, Peng; Zhu, Rong; Que, Ruiyi

doi:10.3390/s91209533

Cited by 70 publications

(57 citation statements)

References 23 publications

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“…however, most of them will greatly interfere with fluid flow during measurement (Zhang et al 2008). Miniaturized shear stress sensors fabricated using MeMS technology offer superior spatial resolution, fast time response and minimized interference with fluid flow (liu and Yuan 2007;liu and Zhu 2009;Beutel et al 2013a). Therefore, MeMS sensors will play an important role for studying gaseous or liquid fluid flows experimentally.…”

mentioning

confidence: 99%

Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

Zhu

Jiang

et al. 2014

Microsyst Technol

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Knowledge of such wall shear stress is essential for understanding the dynamics of the fluid flow, and its measurement holds great importance for investigating and controlling wall-bound turbulence and flow separation (Bellhouse and Schultz 1966;Goldstein 1996;Kimura et al. 1999;lin et al. 2005;Wang et al. 2007;Sturm et al. 2012). Presently, there are many measurement techniques for shear stress. however, most of them will greatly interfere with fluid flow during measurement (Zhang et al. 2008). Miniaturized shear stress sensors fabricated using MeMS technology offer superior spatial resolution, fast time response and minimized interference with fluid flow (liu and Yuan 2007;liu and Zhu 2009;Beutel et al. 2013a). Therefore, MeMS sensors will play an important role for studying gaseous or liquid fluid flows experimentally.Micro thermal shear stress sensors are based on measurement of heat transfer from a heated thin-film element to the fluid flow (Osorio and Silin 2011). constant current (cc) mode can be used to drive them. There are many reported thermal shear-stress sensors working in cc mode. The shear-stress sensitivity of a micromachined thermal shear stress sensor reported by chang liu is 15 mV/Pa at a power consumption of 12 mW (I = 2 ma) when the shear stress input was about 0.2 Pa (liu et al. 1994). Mark Sheplak has presented a characterization of a silicon-micromachined thermal shear-stress sensor (Sheplak et al. 2002). The sensitivity of this sensor is 11 mV/Pa at a power consumption of 9 mW (I = 10 ma) when the shear stress input was about 0.2 Pa.In this paper, we studied how to improve sensitivity of thermal shear stress sensor working underwater with allowable drive currents. They were obtained by analyzing I-V characteristic and output voltage-shear stress relationship. and they were be allied to drive the sensor in two different shear stress input ranges to explore the advancement of sensitivity.Abstract Drive current is an important parameter of thermal shear stress sensor. Increasing drive current is helpful for enhancing its sensitivity. however, there must be an allowable drive current for the sake of safe working temperature of the sensor. how to make full use of drive current to increase the sensor's sensitivity working underwater was studied. If the allowable drive current in still water and the current in stream water are used to drive the sensor in lower and higher shear stress input ranges, respectively, sensitivity of the sensor will be enhanced with the sensor working under a safe temperature. The both currents were separately determined by analyzing I-V characteristic and output voltage-shear stress relationship. We can improve the sensor's sensitivity from 11.8 to 27.5 mV/Pa when shear stress input was 0.4 Pa.

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confidence: 99%

Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

Zhu

Jiang

et al. 2014

Microsyst Technol

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“…Polymer substrates have been used to create flexible sensors that can be placed on curved surfaces [61][62][63]. Ahrens et al created sensors for sensing possible leakage in piston systems using a polymer substrate.…”

Section: Thermoresistivementioning

confidence: 99%

Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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“…SCTs were electrified for aging with a 20 mA current for 12 h based on self-heating. Through the post treatments, the structural defects and internal stress are eliminated, and accordingly, the stability and TCR of the SCTs are enhanced (Liu et al 2009 …”

Section: Sensor Fabricationmentioning

confidence: 99%

Brain temperature measurement: A study of in vitro accuracy and stability of smart catheter temperature sensors

et al. 2011

Biomed Microdevices

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The injured brain is vulnerable to increases in temperature after severe head injury. Therefore, accurate and reliable measurement of brain temperature is important to optimize patient outcome. In this work, we have fabricated, optimized and characterized temperature sensors for use with a micromachined smart catheter for multimodal intracranial monitoring. Developed temperature sensors have resistance of 100.79 ± 1.19Ω and sensitivity of 67.95 mV/°C in the operating range from15-50°C, and time constant of 180 ms. Under the optimized excitation current of 500 μA, adequate signal-to-noise ratio was achieved without causing self-heating, and changes in immersion depth did not introduce clinically significant errors of measurements (<0.01°C). We evaluated the accuracy and long-term drift (5 days) of twenty temperature sensors in comparison to two types of commercial temperature probes (USB Reference Thermometer, NIST-traceable bulk probe with 0.05°C accuracy; and IT-21, type T type clinical microprobe with guaranteed 0.1°C accuracy) under controlled laboratory conditions. These in vitro experimental data showed that the temperature measurement performance of our sensors was accurate and reliable over the course of 5 days. The smart catheter temperature sensors provided accuracy and long-term stability comparable to those of commercial tissue-implantable microprobes, and therefore provide a means for temperature measurement in a microfabricated, multimodal cerebral monitoring device.

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A Flexible Flow Sensor System and Its Characteristics for Fluid Mechanics Measurements

Cited by 70 publications

References 23 publications

Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement

Micromachined Thermal Flow Sensors—A Review

Brain temperature measurement: A study of in vitro accuracy and stability of smart catheter temperature sensors

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