Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips

Vulto, Paul; Glade, Nicolas; Altomare, Luigi; Bablet, J.; Tin, L. Del; Medoro, Gianni; Chartier, Isabelle; Manaresi, Nicolò; Tartagni, Marco; Guerrieri, R.

doi:10.1039/b411885e

Cited by 170 publications

(137 citation statements)

References 14 publications

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“…The resist can be double-bonded at relatively low temperatures without the use of extra adhesives, and so complex devices can be fabricated with active elements on two substrate layers. 99 Aspect ratios of more than two can be achieved for free standing structures such as channels and pillars. The dry resist is inexpensive, fluid sealable, biocompatible, and can be processed on almost any substrate with any dimension, ranging from a single chip to complete silicon wafer.…”

Section: Technologymentioning

confidence: 99%

Review Article—Dielectrophoresis: Status of the theory, technology, and applications

2010

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A review is presented of the present status of the theory, the developed technology and the current applications of dielectrophoresis ͑DEP͒. Over the past 10 years around 2000 publications have addressed these three aspects, and current trends suggest that the theory and technology have matured sufficiently for most effort to now be directed towards applying DEP to unmet needs in such areas as biosensors, cell therapeutics, drug discovery, medical diagnostics, microfluidics, nanoassembly, and particle filtration. The dipole approximation to describe the DEP force acting on a particle subjected to a nonuniform electric field has evolved to include multipole contributions, the perturbing effects arising from interactions with other cells and boundary surfaces, and the influence of electrical double-layer polarizations that must be considered for nanoparticles. Theoretical modelling of the electric field gradients generated by different electrode designs has also reached an advanced state. Advances in the technology include the development of sophisticated electrode designs, along with the introduction of new materials ͑e.g., silicone polymers, dry film resist͒ and methods for fabricating the electrodes and microfluidics of DEP devices ͑photo and electron beam lithography, laser ablation, thin film techniques, CMOS technology͒. Around three-quarters of the 300 or so scientific publications now being published each year on DEP are directed towards practical applications, and this is matched with an increasing number of patent applications. A summary of the US patents granted since January 2005 is given, along with an outline of the small number of perceived industrial applications ͑e.g., mineral separation, micropolishing, manipulation and dispensing of fluid droplets, manipulation and assembly of micro components͒. The technology has also advanced sufficiently for DEP to be used as a tool to manipulate nanoparticles ͑e.g., carbon nanotubes, nano wires, gold and metal oxide nanoparticles͒ for the fabrication of devices and sensors. Most efforts are now being directed towards biomedical applications, such as the spatial manipulation and selective separation/enrichment of target cells or bacteria, high-throughput molecular screening, biosensors, immunoassays, and the artificial engineering of three-dimensional cell constructs. DEP is able to manipulate and sort cells without the need for biochemical labels or other bioengineered tags, and without contact to any surfaces. This opens up potentially important applications of DEP as a tool to address an unmet need in stem cell research and therapy.

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Section: Technologymentioning

confidence: 99%

Review Article—Dielectrophoresis: Status of the theory, technology, and applications

2010

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“…1) featuring a microchannel of height 40-50 m, width 2 mm, and length 2 cm. This microchannel is obtained by sandwiching a dry film resist that has a lithographic trench between a CNT covered silicon substrate and a microscope glass coverslip, following a recently introduced method [19]. A pressure-driven flow is set up by controlling inlet and outlet pressures in the range of ÿ50 to 100 mbar with respect to the atmospheric pressure, while the pressure drop along the channel remains below 2 mbar.…”

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confidence: 99%

Slippage of Water Past Superhydrophobic Carbon Nanotube Forests in Microchannels

et al. 2006

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We present in this letter an experimental characterization of liquid flow slippage over superhydrophobic surfaces made of carbon nanotube forests, incorporated in microchannels. We make use of a µ-PIV (Particule Image Velocimetry) technique to achieve the submicrometric resolution on the flow profile necessary for accurate measurement of the surface hydrodynamic properties. We demonstrate boundary slippage on the Cassie superhydrophobic state, associated with slip lengths of a few microns, while a vanishing slip length is found in the Wenzel state, when the liquid impregnates the surface. Varying the lateral roughness scale L of our carbon nanotube forest-based superhydrophobic surfaces, we demonstrate that the slip length varies linearly with L in line with theoretical predictions for slippage on patterned surfaces.

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“…The dry film resist Ordyl SY 330 (Elga Europe, Milano, Italy) was processed similar to the method described by Vulto et al 10 LEDs were mounted inside a 50 mm long black polymer tube (i.d. 5 mm) positioned 10 mm from the end which contained a 3 mm pinhole.…”

Section: Methodsmentioning

confidence: 99%

Maskless photolithography using UV LEDs

Guijt¹,

Breadmore²

2008

Lab Chip

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A UV light emitting diode (LED) with a maximum output of 372 nm was collimated using a pinhole and a small plastic tube and focused using a microscope objective onto a substrate for direct lithographic patterning of the photoresist. Movement of the substrate with a motorised linear stage (syringe pump) allowed lines in SU-8 to be pattered with a width down to 35 lm at a linear velocity of 80 lm s −1 , while in the dry film resist Ordyl SY 330, features as narrow as 17 lm were made at a linear velocity of 245 lm s −1 . At this linear velocity, a 75 mm long feature could be patterned in 5 min. Functional microfluidic devices were made by casting PDMS on a master made by LED lithography. The results show that UV LEDs are a suitable light source for direct writing lithography, offering a budget friendly, and high resolution alternative for rapid prototyping of features smaller than 20 lm.

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Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips

Cited by 170 publications

References 14 publications

Review Article—Dielectrophoresis: Status of the theory, technology, and applications

Review Article—Dielectrophoresis: Status of the theory, technology, and applications

Slippage of Water Past Superhydrophobic Carbon Nanotube Forests in Microchannels

Maskless photolithography using UV LEDs

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