“…On the other hand, the contact angle values are determined by the roughness and heterogeneity of the surface. In the case of parylene C, it is of particular importance, since the absolute value of SFE for this polymer depends on several factors, such as the parameters of the CVD process (sublimation rate, pressure in the deposition chamber, deposition angle [4]), film thickness [5], substrate properties (structure, geometry, adhesion) and conditioning (e.g. as described in the Letter -"immediately prior to deposition, the wafer was heated at 160°for 10 min") as well as the post deposition treatment (e.g.…”