Microfabrication of Si-Based High-Index-Contrast-Grating Structure by Thermal Nanoimprint Lithography and Cl₂/Xe-Inductively Coupled Plasma Etching

Abstract

A descriptive analysis is given of a fibre-optic rotation-sensing system that incorporates an optical Bragg cell as a multipurpose component. The Bragg cell simplifies the fibre-optic system and yields two output signals being out of phase that produce a differential output for improvement of the signal-to-noise ratio. Performance characteristics have been verified experimentally.

Microfabrication of Si and GaAs by Plasma Etching Process Using Bacterial Cells as an Etching Mask Material

“…[12][13][14][15][16][17][18] In these processes, the resistivity of polymaterials against reactive plasma is very important. 19) In addition, the process of removal of polymaterials as the mask should be easy.…”

Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching Process

“…[19][20][21][22][23] The etching conditions were a Cl 2 flow rate of 2 sccm, an ICP/bias RF power of 300/20 W, and a pressure of 1 Pa. The substrate temperature was 90 C. 24) The width of the upper part of the microchannel was 2 m, and the width and depth of the lower part of the microchannel were 0.7 and 0.5 m, respectively. It was found that the structure of the microchannel, as proposed in Fig.…”