Microfabrication of palladium-silver alloy membranes for hydrogen separation

Tong, Hien D.; Berenschot, J.W.; Boer, Meint J. de; Gardeniers, Han; Wensink, H.; Jansen, Henricus V.; Nijdam, W.; Elwenspoek, Michael Curt; Gielens, F.C.; Rijn, C.J.M. van

doi:10.1109/jmems.2003.818458

Cited by 40 publications

(8 citation statements)

References 26 publications

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“…The latter means that in the initial section, hydrogen flow can be expressed in terms of flows and since in this case, Eq. ( 19) is equivalent to the equality (20) Figure 2 shows that all the derivatives of at the output of the initial section are small; therefore, functions and (see (18)) tend to zero. This means that both reactions (1) and ( 2) reach an equilibrium state at which the rates of forward and reverse reactions are practically equal.…”

Section: Theoretical Model Of Steam Methane Reforming In a Membrane Reactormentioning

confidence: 98%

“…Thinner palladium layers (less than 10 μm) are obtained by depositing palladium onto porous substrates (porous glass, ceramics, and metals) by electrochemical methods, chemical vapor deposition, magnetron sputtering, etc. [20][21][22][23][24][25][26][27]. Such composite membranes have high hydrogen conductivity; how-ever, they are insufficiently hydrogen selective, rather difficult to manufacture, and cannot maintain thermal and chemical stability for a long time.…”

Section: Introductionmentioning

confidence: 99%

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Simulation of Steam Methane Reforming in a Membrane Reactor with a Nickel Catalyst and a Palladium Alloy Foil

Babak

Didenko

Kvurt

et al. 2021

Theor Found Chem Eng

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A model of steam methane reforming in a catalytic reactor has been developed the working part of which is two cylindrical chambers separated by a membranous wall. The upper chamber is evacuated while the lower one is maintained at atmospheric pressure. With a uniform supply of raw materials along the outer perimeter of the lower chamber, the problem is reduced to finding the average flows of CH 4 , H 2 O, CO 2 , CO, and H 2 from the solution of a system of five nonlinear ordinary differential equations of the first order. The calculations were carried out for a Pd-6% Ru membrane in the temperature range of 673 K < T < 973 K at a steam/methane inlet flow ratio of 3 and a feed rate of 1800-9600 L/h. As a result of comparing the calculations with experimental data, a theoretical substantiation of the main regularities of the process observed in practice was obtained.

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Section: Theoretical Model Of Steam Methane Reforming In a Membrane Reactormentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Simulation of Steam Methane Reforming in a Membrane Reactor with a Nickel Catalyst and a Palladium Alloy Foil

Babak

Didenko

Kvurt

et al. 2021

Theor Found Chem Eng

View full text Add to dashboard Cite

show abstract

“…Likewise the extraordinary number of pores might be helpful as injector or spray nozzles and fast diffusion mixer devices. The property of a large effective surface area might be explored in capacitors, batteries, catalysis and dense membranes [86][87][88][89][90][91]. Furthermore, hollow and smooth fractal surfaces might be useful in trapping light for solar cell and photonic applications [92][93][94][95][96].…”

Section: Potential Applicationsmentioning

confidence: 99%

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

Berenschot

Jansen

Tas

2013

J. Micromech. Microeng.

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When it comes to high-performance filtration, separation, sunlight collection, surface charge storage or catalysis, the effective surface area is what counts. Highly regular fractal structures seem to be the perfect candidates, but manufacturing can be quite cumbersome. Here it is shown-for the first time-that complex 3D fractals can be engineered using a recursive operation in conventional micromachining of single crystalline silicon. The procedure uses the built-in capability of the crystal lattice to form self-similar octahedral structures with minimal interference of the constructor. The silicon fractal can be used directly or as a mold to transfer the shape into another material. Moreover, they can be dense, porous, or like a wireframe. We demonstrate, after four levels of processing, that the initial number of octahedral structures is increased by a factor of 625. Meanwhile the size decreases 16 times down to 300 nm. At any level, pores of less than 100 nm can be fabricated at the octahedral vertices of the fractal. The presented technique supports the design of fractals with Hausdorff dimension D free of choice and up to D = 2.322.

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“…There have been efforts to improve thermal efficiency by utilizing a fuel combustor in intimate thermal contact to supply heat to the reformer enabled by the low heat transfer resistances typical in planar microfabricated systems [11][12][13]. Work has also been done to integrate selective membranes with a reactor to deliver pure hydrogen to the fuel cell anode [14][15][16].…”

Section: Introductionmentioning

confidence: 99%

An integrated MEMS infrastructure for fuel processing: hydrogen generation and separation for portable power generation

Varady

McLeod

Meacham

et al. 2007

J. Micromech. Microeng.

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Portable fuel cells are an enabling technology for high efficiency and ultra-high density distributed power generation, which is essential for many terrestrial and aerospace applications. A key element of fuel cell power sources is the fuel processor, which should have the capability to efficiently reform liquid fuels and produce high purity hydrogen that is consumed by the fuel cells. To this end, we are reporting on the development of two novel MEMS hydrogen generators with improved functionality achieved through an innovative process organization and system integration approach that exploits the advantages of transport and catalysis on the micro/nano scale. One fuel processor design utilizes transient, reverse-flow operation of an autothermal MEMS microreactor with an intimately integrated, micromachined ultrasonic fuel atomizer and a Pd/Ag membrane for in situ hydrogen separation from the product stream. The other design features a simpler, more compact planar structure with the atomized fuel ejected directly onto the catalyst layer, which is coupled to an integrated hydrogen selective membrane.

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Microfabrication of palladium-silver alloy membranes for hydrogen separation

Abstract: [901]

Cited by 40 publications

References 26 publications

Simulation of Steam Methane Reforming in a Membrane Reactor with a Nickel Catalyst and a Palladium Alloy Foil

Simulation of Steam Methane Reforming in a Membrane Reactor with a Nickel Catalyst and a Palladium Alloy Foil

Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon

An integrated MEMS infrastructure for fuel processing: hydrogen generation and separation for portable power generation

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