Microfabrication: LIGA-X and applications

Kupka, R. K.; Bouamrane, F.; Cremers, Carsten; Megtert, S.

doi:10.1016/s0169-4332(00)00354-8

Cited by 97 publications

(65 citation statements)

References 79 publications

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“…Although, in terms of economy, this will consume additional resources, it will be insignificant, not least because we expect that more than 1000 polymeric parts may be obtained from a single master [27]. As an alternative to DRIE of silicon, X-ray lithography may be used to produce the mold insert [28].…”

Section: Discussionmentioning

confidence: 99%

Injection molded polymeric hard X-ray lenses

Stöhr¹,

Simons²,

Jakobsen³

et al. 2015

Opt. Mater. Express

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A novel and economical approach for fabricating compound refractive lenses for the purpose of focusing hard X-rays is described. A silicon master was manufactured by UV-lithography and deep reactive ion etching (DRIE). Sacrificial structures were utilized, which enabled accurate control of the etching profile and were removed after DRIE. By electroplating, an inverse nickel sample was obtained, which was used as a mold insert in a commercial polymer injection molding machine. A prototype lens made of polyethylene with a focal length of 350 mm was tested using synchrotron radiation at photon energies of 17 keV. A 55 µm long line focus with a minimal waist of 770 nm (FWHM) and a total lens transmittance of 32% were measured. Due to its suitability for cheap mass production, this highly efficient optics may find widespread use in hard Xray instruments.

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Section: Discussionmentioning

confidence: 99%

Injection molded polymeric hard X-ray lenses

Stöhr¹,

Simons²,

Jakobsen³

et al. 2015

Opt. Mater. Express

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“…X-ray LIGA is used for fabrication of microstructures with aspect ratio as high as 500:1 with lateral precision below one micrometer and parallel, smooth side walls. But the synchrotron source used to generate X-rays is expensive, hence rendering it out of reach for low cost production [2,3]. However UV-LIGA has paved way for implementation of LIGA process in an economical manner [4].…”

Section: Introductionmentioning

confidence: 99%

Su-8 Based Uv-Liga Fabrication Process for Realization of Nickel Based Mems Inertial Sensor

Verma

Khan²,

Fomchenkov

et al. 2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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Abstract. This paper reports the complete fabrication process flow based on UV-LIGA technology for realization of metal based MEMS inertial sensor. In this process, nickel is used as the structural layer and copper as the sacrificial layer. The economical three mask process has been optimized and the detailed step by step procedure for carrying out the fabrication is presented. The optimized process parameters to achieve void free copper and nickel electroplated layers with extremely low roughness have been reported. Footing problem associated with lithography process has been analysed and its solution discussed. The fabrication results after each process step have been presented and discussed. Scanning electron micrograph images of the released prototype inertial sensor devices have been presented to demonstrate the successful fabrication of the prototypes using the economical UV-LIGA process. Keywords: MEMS, UV-LIGA, SU-8 2010, Cu and Ni electroplatingCitation: Verma Payal, Zaman Khan K, Fomchenkov SA, Gopal R. SU-8 based UV-LIGA fabrication process for realization of nickel based MEMS inertial sensor.

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“…The LIGA process, which consists of deep X-ray lithography, electroplating and plastic molding, is a main fabrication method for microelectromechanical systems (Kupka et al 2000), especially high aspect ratio microstructures (HARMS). In order to maintain the precision of pattern transfer from the resist to the final product, effective electroforming processes are necessary.…”

Section: Introductionmentioning

confidence: 99%

Fabricating HARMS by using megasonic assisted electroforming

et al. 2008

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Electroforming is a main fabrication method to produce metal microstructures for microelectromechanical systems. Since the mass transport is limited in high aspect ratio microstructures (HARMS), problems such as uneven filling and void formation are often involved in the electroplating of deep molds. In this work, megasonic agitation is employed to improve the electroplating of HARMS, which causes little damage to the resist structure and is thereby advantageous over ultrasonic agitation. Cantilever beams and gaps with a linewidth of 10 lm and an aspect ratio of 25 have been obtained. The main effects of megasonic agitation are analyzed. The results indicate that resonant bubbles in the electrolyte are probably responsible for the mass transport enhancement during the electroforming process.

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Microfabrication: LIGA-X and applications

Cited by 97 publications

References 79 publications

Injection molded polymeric hard X-ray lenses

Injection molded polymeric hard X-ray lenses

Su-8 Based Uv-Liga Fabrication Process for Realization of Nickel Based Mems Inertial Sensor

Fabricating HARMS by using megasonic assisted electroforming

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