Microfabricated small metal cantilevers with silicon tip for atomic force microscopy

Chand, Ami; Viani, Mario; Schäffer, Tilman E.; Hansma, Paul K.

doi:10.1109/84.825785

Cited by 47 publications

(29 citation statements)

References 17 publications

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“…The bimetallic strip effect can be minimized by coating the cantilever on an area close to the tip only, whereby creating a "reflector pad" on which the laser can be positioned (Viani et al, 1999a). A coating process can be avoided by fabricating the cantilever entirely out of metal in the first place (Schäffer et al, 1997;Chand et al, 2000). Figure 13.7a shows an array of small aluminum cantilevers.…”

Section: Increasing the Resonant Frequency Of Cantileversmentioning

confidence: 98%

High‐Speed Atomic Force Microscopy of Biomolecules in Motion

Schäffer

2005

Force Microscopy

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Section: Increasing the Resonant Frequency Of Cantileversmentioning

confidence: 98%

High‐Speed Atomic Force Microscopy of Biomolecules in Motion

Schäffer

2005

Force Microscopy

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“…Where it has been reported, the SOI wafers used in these processes were obtained from SIMOX (Separation by ion implantation of oxygen) process [11], [12]. Work has also been reported on fabricating nanosized cantilever beams using other materials such as silicon nitride [14] and metals [15].…”

Section: B Reported Nanoscale Cantilever Fabricationmentioning

confidence: 99%

Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams

Gupta

Denton

McNally

et al. 2003

J. Microelectromech. Syst.

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This paper describes a novel technique for the fabrication of surface micromachined thin silicon cantilever beams using merged epitaxial lateral overgrowth (MELO) of silicon and chemical-mechanical polishing (CMP). The objective is to demonstrate the feasibility of using this novel technique for the fabrication of arrays of ultrathin, low-stress, single-crystal silicon cantilever beams for use in ultrahigh sensitivity surface-stress or resonant-frequency-based chemical or biological detection schemes. The process flow used in this work will be described in detail and the issues that were faced during the fabrication will be discussed. Cantilever beams with thickness of 0.3-0.5 m that were 10-25-m wide and 75-130-m long were fabricated. Mechanical characterization of the cantilever beams were performed by measuring their spring constant using the "added mass" method, which also demonstrated the use of these initial structures to detect masses as low as 10-100 pg. Further work is underway to scale the thickness of these beams down to the sub-100-nm regime.[823]Index Terms-Cantilever beam, chemical-mechanical polishing (CMP), merged epitaxial lateral overgrowth, silicon-on-insulator (SOI).

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“…The manufacturing of small cantilevers, described also in some papers, uses similar manufacturing processes with similar tolerances or an inadequate cantilever material, like polyimide or gold. Ductile materials like gold damp the quality factor of such cantilevers, oscillating in free amplitude, down to under 100 in air (Chand et al 2000).…”

Section: Introductionmentioning

confidence: 99%

Cantilever probes for high speed AFM

et al. 2012

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Since the invention in 1986 atomic force microscopy (AFM) has become the most widely used scanning probe microscopy (Binnig et al. in Phys Rev Lett 56:930-933, 1986). The microscope images the interaction of forces like Van der Waals or Coulomb forces between a sample and the apex of a small tip integrated near the free end of a flexible cantilever. But as all other scanning probe techniques the AFM requires serial data acquisition and suffers therefore from a low temporal resolution. Enhancing the speed to video rate imaging makes high demands on scanner technology, control electronics and on the key feature the cantilever with integrated sharp stylus. For the cantilever probes, fundamental resonance frequencies in the MHz regime are envisaged while the force constant of a few nN/nm shall be maintained. We present different novel AFM probes with ultrashort cantilevers and integrated sharp tips for high speed AFM while focusing on widely dispersed applications and on aspects of mass fabrication.

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Microfabricated small metal cantilevers with silicon tip for atomic force microscopy

Cited by 47 publications

References 17 publications

High‐Speed Atomic Force Microscopy of Biomolecules in Motion

High‐Speed Atomic Force Microscopy of Biomolecules in Motion

Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams

Cantilever probes for high speed AFM

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