Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy

Wielgoszewski, Grzegorz; Sulecki, P.; Gotszalk, Teodor; Janus, P.; Szmigiel, Dariusz; Grabiec, P.; Zschech, Ehrenfried

doi:10.1116/1.3502614

Cited by 21 publications

(20 citation statements)

References 12 publications

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“…The V 3 ω amplitude is directly proportional to an increase of temperature due to Joule heating: V 3 ω = αT 2 ω R p0 I ω /2, where I ω is the amplitude of the exciting current and T 2 ω is the amplitude of second‐harmonic of the probe mean temperature. Different configurations of electrical bridge can be used to measure the electrical resistance of the probe and deduce its temperature .…”

Section: Instrumentation and Sthm Methodsmentioning

confidence: 99%

Scanning thermal microscopy: A review

Gomès

Assy

Chapuis

2015

Phys. Status Solidi A

224

218

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Fundamental research and continued miniaturization of materials, components and systems have raised the need for the development of thermal-investigation methods enabling ultra-local measurements of surface temperature and thermophysical properties in many areas of science and applicative fields. Scanning thermal microscopy (SThM) is a promising technique for nanometer-scale thermal measurements, imaging, and study of thermal transport phenomena. This review focuses on fundamentals and applications of SThM methods. It inventories the main scanning probe microscopy-based techniques developed for thermal imaging with nanoscale spatial resolution. It describes the approaches currently used to calibrate the SThM probes in thermometry and for thermal conductivity measurement. In many cases, the link between the nominal measured signal and the investigated parameter is not straightforward due to the complexity of the micro/nanoscale interaction between the probe and the sample. Special attention is given to this interaction that conditions the tip-sample interface temperature. Examples of applications of SThM are presented, which include the characterization of operating devices, the measurements of the effective thermal conductivity of nanomaterials and local phase transition temperatures. Finally, future challenges and opportunities for SThM are discussed.

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Section: Instrumentation and Sthm Methodsmentioning

confidence: 99%

Scanning thermal microscopy: A review

Gomès

Assy

Chapuis

2015

Phys. Status Solidi A

224

218

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“…A comparison between the tip temperature and the calculated thermal resistance reveals that only variation in thermal resistance exceeding 9 × 10 3 K/W will result in a measurable deviation. The noise in this experiment comes from various sources, with sensor circuitry, variations in ambient conditions and residual sample topography all contributing 45 . The root-mean-square value of noise in this experiment is 0.038 K. This value however cannot be directly used to define the sensitivity of the probe to sample thermal resistance, since the sensitivity is dependent on the thermal interfacial resistance between the probe and sample, which changes with sample material.…”

Section: Results!mentioning

confidence: 99%

Dimension- and shape-dependent thermal transport in nano-patterned thin films investigated by scanning thermal microscopy

Zhang¹,

Weaver²,

Dobson³

2017

Nanotechnology

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Scanning thermal microscopy (SThM) is a technique which is often used for the measurement of the thermal conductivity of materials at the nanometre scale. The impact of nano-scale feature size and shape on apparent thermal conductivity, as measured using SThM, has been investigated. To achieve this, our recently developed topography-free samples with 200 and 400 nm wide gold wires (50 nm thick) of length of 400-2500 nm were fabricated and their thermal resistance measured and analysed. This data was used in the development and validation of a rigorous but simple heat transfer model that describes a nanoscopic contact to an object with finite shape and size. This model, in combination with a recently proposed thermal resistance network, was then used to calculate the SThM probe signal obtained by measuring these features. These calculated values closely matched the experimental results obtained from the topography-free sample. By using the model to analyse the dimensional dependence of thermal resistance, we demonstrate that feature size and shape has a significant impact on measured thermal properties that can result in a misinterpretation of material thermal conductivity. In the case of a gold nanowire embedded within a silicon nitride matrix it is found that the apparent thermal conductivity of the wire appears to be depressed by a factor of twenty from the true value. These results clearly demonstrate the importance of knowing both probe-sample thermal interactions and feature dimensions as well as shape when using SThM to quantify material thermal properties. Finally, the new model is used to identify the heat flux sensitivity, as well as the effective contact size of the conventional SThM system used in this study.

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“…At first, the scanning tunneling microscope (STM) measured the temperature-dependent tunneling voltage between the STM tip and the sample. 1,121 Subsequent studies utilized AFM cantilever-based sensors such as an AFM cantilever with an integrated thermocouple junction 2,10,24,26,28,117,122−125 or a resistive element, 75,[79][80][81][82]126,127 although several SThM schemes employed a regular AFM cantilever. 74,76 In order to improve the spatial and temporal resolution, the sensor size was scaled down to below 100 nm 75,125 and the sensing region was thermally isolated.…”

Section: Related Cantilever-based Thermometry Techniquesmentioning

confidence: 99%

Heated Atomic Force Microscope Cantilevers and Their Applications

King

Bhatia

Felts

et al. 2013

Annual Rev Heat Transfer

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Atomic force microscope (AFM) cantilevers with integrated heaters enable nanometer-scale heat flow measurements, materials characterization, nanomanufacturing, and many other applications. When a heated AFM cantilever tip is in contact with a substrate, the interface is a nanometer-scale hotspot whose temperature can be controlled over a large temperature range. Over the past decade, there has been significant improvements in the understanding of heat flows within and from a heated an AFM cantilever. There have also been improvements in the characterization and calibration of these heated AFM cantilevers. These advancements have led to new heated AFM cantilever designs and have enabled new applications of heated AFM cantilevers. This chapter describes research into heat transfer fundamentals, cantilever technology, and applications of heated AFM cantilevers.

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Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy

Cited by 21 publications

References 12 publications

Scanning thermal microscopy: A review

Scanning thermal microscopy: A review

Dimension- and shape-dependent thermal transport in nano-patterned thin films investigated by scanning thermal microscopy

Heated Atomic Force Microscope Cantilevers and Their Applications

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