Microelectronic test patterns

Test patterns NBS-28 and NBS-28A

“…The random fault structures on test patterns NBS-28 and NBS-28A are intended to assess the capability of a process to produce a single level of fault-free metal interconnects as a function of area and as a function of linewidth and spacing. The present structure configuration is an extension of the random fault step coverage test structure on test pattern NBS-7 [3][4][5] redesigned to include more steps with smaller dimensions, and to permit investigation of methods of testing and data analysis in more detail.…”

Radiation Effects Test Chip Guidelines

“…In selecting test structures for a parthe development of standard test structure de-ticular application, the engineer must have a signs [1]. The 400 series of NBS Special Publi-clear understanding of his objectives.…”