Microcavity-like leaky mode emission from a planar optical waveguide made of luminescent silicon nanocrystals

Valenta, J.; Ostatnický, T.; Pelant, I.; Elliman, R. G.; Linnros, Jan; Hönerlage, B.

doi:10.1063/1.1795984

Cited by 27 publications

(28 citation statements)

References 20 publications

(12 reference statements)

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“…Few loss studies have been recently reported only on slab waveguides with Si-nc. [16][17][18] In this work first we present a thorough study on the physical and optical characteristics of rib-loaded waveguides containing Si-nc obtained by ion implantation of Si into silica to create a well-controlled Si excess profile followed by an annealing step for the precipitation and growth of the Si nanoclusters. The structural and optical characteristics of the active material have been studied, leading to a good knowledge and control of its properties.…”

Section: Introductionmentioning

confidence: 99%

Low-loss rib waveguides containing Si nanocrystals embedded in SiO2

Pellegrino¹,

Garrido²,

Garcı́a³

et al. 2005

Journal of Applied Physics

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We report on the study and modeling of the structural and optical properties of rib-loaded waveguides working in the 600-900-nm spectral range. A Si nanocrystal ͑Si-nc͒ rich SiO 2 layer with nominal Si excess ranging from 10% to 20% was produced by quadrupole ion implantation of Si into thermal SiO 2 formed on a silicon substrate. Si-ncs were precipitated by annealing at 1100°C, forming a 0.4-m-thick core layer in the waveguide. The Si content, the Si-nc density and size, the Si-nc emission, and the active layer effective refractive index were determined by dedicated experiments using x-ray photoelectron spectroscopy, Raman spectroscopy, energy-filtered transmission electron microscopy, photoluminescence and m-lines spectroscopy. Rib-loaded waveguides were fabricated by photolithographic and reactive ion etching processes, with patterned rib widths ranging from 1 to 8 m. Light propagation in the waveguide was observed and losses of 11 dB/ cm at 633 and 780 nm were measured, modeled and interpreted.

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Section: Introductionmentioning

confidence: 99%

Low-loss rib waveguides containing Si nanocrystals embedded in SiO2

Pellegrino¹,

Garrido²,

Garcı́a³

et al. 2005

Journal of Applied Physics

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“…This system is regarded as a basis for an important class of materials for the development of lasers [13], optical waveguides [14], photonic [15] and third generation solar cell devices [16] based on Si. The formation of Si-ncls within amorphous silicon oxides at different annealing stages has been studied by various techniques, and surprisingly high crystallization temperatures [2,3] and low activation energies of nanocrystal size growth [2,4] have been reported.…”

Section: Introductionmentioning

confidence: 99%

From amorphous to crystalline silicon nanoclusters: structural effects on exciton properties

Borrero-González

Nunes

Guimarães

et al. 2011

J. Phys.: Condens. Matter

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Synchrotron x-ray absorption spectroscopy (XAS) and electron spin resonance (ESR) experiments were performed to determine, in combination with Raman spectroscopy and x-ray diffraction (XRD) data from previous reports, the structure and paramagnetic defect status of Si-nanoclusters (ncls) at various intermediate formation stages in Si-rich Si oxide films having different Si concentrations (y = 0.36-0.42 in Si y O 1−y ), fabricated by electron cyclotron resonance plasma-enhanced chemical vapor deposition and isochronally (2 h) annealed at various temperatures (T a = 900-1100 • C) under either Ar or (Ar + 5%H 2 ) atmospheres. The corresponding emission properties were studied by stationary and time dependent photoluminescence (PL) spectroscopy in correlation with the structural and defect properties. To explain the experimental data, we propose crystallization by nucleation within already existing amorphous Si-ncls as the mechanism for the formation of the Si nanocrystals in the oxide matrix. The cluster-size dependent partial crystallization of Si-ncls at intermediate T a can be qualitatively understood in terms of a 'crystalline core-amorphous shell' Si-ncl model. The amorphous shell, which is invisible in most diffraction and electron microscopy experiments, is found to have an important impact on light emission. As the crystalline core grows at the expense of a thinning amorphous shell with increasing T a , the PL undergoes a transition from a regime dominated by disorder-induced effects to a situation where quantum confinement of excitons prevails.

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“…[1][2][3] Currently, the rapidly increasing demand for communication is causing a rapid increase in the use of an OW device and the ability to easily arrange optical fibers is particularly needed in order rapidly and efficiently to transfer an optical signal. To satisfy this requirement, the fabrication of a multimode optical waveguide ͑MOW͒ device with a large core structure is considered very important and has been actively studied recently.…”

mentioning

confidence: 99%

Direct photofabrication of refractive-index-modulated multimode optical waveguide using photosensitive sol-gel hybrid materials

Kang

Kim

Bae

et al. 2005

Applied Physics Letters

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Photosensitive sol-gel hybrid materials ͑hybrimers͒ exhibited a thick film property, an efficient refractive index tunability through the control of their compositions, and a high photosensitivity upon UV exposure. The materials were used for the direct photofabrication of the multimode optical waveguide ͑MOW͒ with a large core structure. Due to the outstanding optical properties of these materials, problems and complexities associated with the fabrication of MOW could be overcome, and a MOW with good propagation performance could be easily fabricated. Importantly, a propagation loss of as low as 0.13 dB cm −1 at 850 nm could be obtained.

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Microcavity-like leaky mode emission from a planar optical waveguide made of luminescent silicon nanocrystals

Abstract: Active planar optical waveguides with silicon nanocrystals: Leaky modes under different ambient conditions

Cited by 27 publications

References 20 publications

Low-loss rib waveguides containing Si nanocrystals embedded in SiO2

Low-loss rib waveguides containing Si nanocrystals embedded in SiO2

From amorphous to crystalline silicon nanoclusters: structural effects on exciton properties

Direct photofabrication of refractive-index-modulated multimode optical waveguide using photosensitive sol-gel hybrid materials

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