2013
DOI: 10.1016/j.ymeth.2013.07.009
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Microcantilever based disposable viscosity sensor for serum and blood plasma measurements

Abstract: a b s t r a c tThis paper proposes a novel method for measuring blood plasma and serum viscosity with a microcantilever-based MEMS sensor. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using an electro-coil. Real-time monitoring of cantilever resonant frequency is performed remotely using diffraction gratings fabricated at the tip of the dynamic cantilevers. Only few nanometer cantilever deflection is sufficient due to interferometric sensitivity of the readout. Th… Show more

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Cited by 57 publications
(50 citation statements)
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“…In our previous studies, we conducted blood plasma viscosity measurements through phase measurements with high sensitivity using the proposed scheme 21,22 . During blood coagulation, a sudden change in the blood plasma viscosity occurs due to fibrin generation 13 .…”
Section: Article Lab On a Chipmentioning
confidence: 99%
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“…In our previous studies, we conducted blood plasma viscosity measurements through phase measurements with high sensitivity using the proposed scheme 21,22 . During blood coagulation, a sudden change in the blood plasma viscosity occurs due to fibrin generation 13 .…”
Section: Article Lab On a Chipmentioning
confidence: 99%
“…The PMMA cartridge contains the MEMS dies with 2.5mm x 2.5 mm size. The nickel cantilevers are actuated magnetically with a coil placed in close proximity of the backside of the PMMA flow cell 21 . The coil is driven with a high power broadband current amplifier.…”
Section: Measurement Setupmentioning
confidence: 99%
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