Microassembled tunable mems inductor

Sarkar, Niladri; Dong, Yan; Horne, E.; Lu, Hong; Ellis, M.; Lee, Jeong; Mansour, Raafat R.; Nallani, Arun Kumar; Skidmore, George D.

doi:10.1109/memsys.2005.1453897

Cited by 23 publications

(12 citation statements)

References 5 publications

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“…The quality factor for this work is considered to be the highest compared to the other works. For tuning range, the designed inductor is better than [7] but some of previous works are not tunable. …”

Section: Simulation Resultsmentioning

confidence: 96%

A Tunable Ferrofluid-based Polydimethylsiloxane (PDMS) Microchannel Inductor for Ultra High Frequency Applications

Razy¹,

Mustaffa²,

Manaf³

et al. 2017

IJECE

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In this work, a tunable ferrofluid-based polydimethylsiloxane (PDMS) microchannel inductor with high quality factor and high tuning range is proposed. For this project, PDMS is used to create a microchannel with a width and height of 0.53 mm and 0.2 mm respectively. The microchannel is then used to cover the whole design of a solenoid inductor. A solenoid inductor is designed using wire bonding technique where lines of copper and bond wires are used to form a solenoid winding on top of silicon substrate. A light hydrocarbon based ferrofluid EMG 901 660 mT with high permeability of 5.4 is used. The ferrofluid-based liquid is injected into the channel to enhance the performance of a quality factor. A 3D full-wave electromagnetic fields tool, ANSYS HFSS is used in this work to simulate the solenoid inductor. The results obtained in this work gives a quality factor of more than 10 at a frequency range of 300 MHz to 3.3 GHz (Ultra High Frequency range). The highest quality factor is 37 which occurs at a frequency of 1.5 GHz, provides a high tuning range of 112%. Keyword:Ferrofluid INTRODUCTIONRecently, researches on a tunable MEMS inductors are widely found in literatures. A tunable MEMS inductor provides a broad range of functions especially in RF and microwaves device applications such as radio frequency (RF) power amplifiers, low noise amplifier (LNA) and voltage-controlled oscillator (VCO) [1]. Commonly, tuning configuration of the inductors can be divided into discretes and continuous variable inductors. Both approaches have different functionality, for example, a discrete tunable inductor is often developed using microrelays or microswitches which are used for controlling the length of the inductor coils [2], [3]. For continuous tunable inductor, a method of displacing the magnetic cores of the solenoid inductor is done in order to have a variation of inductance values [3]. Both methods are seen to have a better robustness and design flexibility compare to a tunable capacitor. For that reason, current researches are focusing on tunable inductor for Ultra High Frequency (UHF) applications.However, the design of tunable inductor(s) is hard to be realized especially at giga-hertz (GHz) range [4]. The difficulty is caused by a relatively smaller size of inductor is required at such frequency range. Plus, with the requirement of high quality factor and good tuning range makes it harder for the design to be realized especially on silicon substrate. On top of that, minituarization of inductor is more difficult due to an ohmic losses and eddy-current losses in a metal traces. Other than that, skin effect also plays its part at high frequency. Most of the current are having a tendency to flow at the outer surface of the conductor. This effect

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Section: Simulation Resultsmentioning

confidence: 96%

A Tunable Ferrofluid-based Polydimethylsiloxane (PDMS) Microchannel Inductor for Ultra High Frequency Applications

Razy¹,

Mustaffa²,

Manaf³

et al. 2017

IJECE

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“…In Table 2, the performance of the proposed TBIs are com- pared with others [13][14][15][20][21][22][23][24][25][26][27] in terms of primary inductance, size, tuning range, Q-factor, and action voltage. Due to the narrow tuning range characteristics below 233 and the need for voltage above 7 V or special operating signals, the tunable inductors [14,15,[20][21][22][23][24][25][26] using MEMS actuators have limitations for general product applications. In Park et al [13], a multi-layer stacked inductor switched by MOSFETs is reported.…”

Section: Fabrication and Measurement Resultsmentioning

confidence: 99%

“…However, they suffer from several drawbacks, such as complexity, difficulty in monolithic integration with other ICs, and reliability problems [11,12]. Analog control with MEMS actuators and digital control with MOS switches have been employed to realize the tunable inductors [13][14][15], but these inductors have drawbacks in Q-factor, tuning range, and action voltage. We propose a high-Q and wide tunable bondwire inductor (TBI) digitally controlled by RF CMOS switches.…”

Section: Introductionmentioning

confidence: 99%

Digitally-Controlled Bondwire Inductor with High Quality Factor and Wide Tuning Range

Lee

2020

J Electromagn Eng Sci

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A tunable bondwire inductor (TBI) with high-quality factor and wide tuning range is presented. The proposed TBI is fabricated on a single chip by combining a single-pole four-throw (SP4T) switch integrated circuit (IC) and four bondwire inductors on a package substrate. The SP4T switch IC is fabricated using 180 nm silicon-on-insulator (SOI) complementary metal-oxide-semiconductor (CMOS) technology. The fabricated TBI chip exhibits a 521% tuning range of inductance from 1.77 to 11 nH at 0.1 GHz and a relatively high-quality factor. To the knowledge of the authors, the results of this work demonstrate the best combined performance of inductance tuning range and quality factor.

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“…Approaches include displacement of magnetic materials such as ferrofluid 4, or permalloy, 5 by changing the core material's magnetic properties, 6,7 and moving a nearby metal plate. 8 For continuously tunable microscale inductors with integrated actuation, however, our past work on tuning by changing coupling between inductor traces has tuning ratios as high as 4.…”

Section: Introductionmentioning

confidence: 99%

Bubble inductors: Pneumatic tuning of a stretchable inductor

Lazarus

Bedair

2017

AIP Advances

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From adaptive matching networks in power systems to channel selectable RF filters and circuitry, tunable inductors are fundamental components for circuits requiring reconfigurability. Here we demonstrate a new continuously tunable inductor based on physically stretching the inductor traces themselves. Liquid-metal-based stretchable conductors are wrapped around a pneumatic bubble actuator, allowing the inductor to be collapsed or expanded by application of pressure. In vacuum the bubble collapses, bringing the loop area to nearly zero, while positive pressure brings a dramatic increase in area and loop inductance. Using this approach, the inductor demonstrated in this work was able to achieve a tuning ratio of 2.6 with 1-2 second response time. With conductors available that can stretch by hundreds of percent, this technique is promising for very large tuning ratios in continuously tunable inductors.

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Microassembled tunable mems inductor

Cited by 23 publications

References 5 publications

A Tunable Ferrofluid-based Polydimethylsiloxane (PDMS) Microchannel Inductor for Ultra High Frequency Applications

A Tunable Ferrofluid-based Polydimethylsiloxane (PDMS) Microchannel Inductor for Ultra High Frequency Applications

Digitally-Controlled Bondwire Inductor with High Quality Factor and Wide Tuning Range

Bubble inductors: Pneumatic tuning of a stretchable inductor

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