Microablation with ultrashort laser pulses

Laser Beam MicroMachining (LBMM) – A review

“…They observed that as compared to the linearly polarized laser radiation, the use of circularly polarized laser radiation reduce the roughness and enhance the ablation rates for the same laser fluence. Zhao et al [129] performed microdrilling on different materials (metal, semiconductor and isolator) using fs laser. Authors reported that fs laser restrain the thermal diffusion inside the ablated materials.…”

Micro‐Laser Processing

“…Zhao et al . [6] reported favorable results on micro-machining of aluminum, using a femtosecond Ti:sapphire laser. …”

“…Zhao et al . [6] applied a femtosecond Ti:sapphire laser for micro-machining of fused silica successfully.…”

“…Laser-based material processing on a microscale has been used in thermal processing, shock peening, surface treatment, cleaning of surfaces, welding, melting and polishing, scribing, as well as micromachining of basic geometric features on a variety of materials [1][2][3][4][5][6][7][8][9][10][11][12].…”

“…Laser-based material processing on a microscale has been used in thermal processing, shock peening, surface treatment, cleaning of surfaces, welding, melting and polishing, scribing, as well as micromachining of basic geometric features on a variety of materials [1][2][3][4][5][6][7][8][9][10][11][12].Lasers are usually categorized as two groups: continuous wave (cw) and pulsed lasers. Conventional cw and pulsed laser irradiation and ablation is used in many fields, such as material processing, machining, etching, deposition, sintering, micro-fluidics, medical, and many other applications [13][14][15][16][17][18][19].…”