Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching

Abstract

-Diamond-Like Carbon (DLC) and Chemical Vapor Deposition (CVD)-diamond films have been widely utilized not only as a hard protective coating for molds and dies but also as a functional substrate for bio-MEMS/ NEMS. Micro-texturing into these hard coated molds and dies provides a productive tool to duplicate the original mother micro-patterns onto various work materials and to construct any tailored micro-textures for sensors and actuators. In the present paper, the high density oxygen plasma etching method is utilized to make micro-line and microgroove patterns onto the DLC and diamond coatings. Our developing oxygen plasma etching system is introduced together with characterization on the plasma state during etching. In this quantitative plasma diagnosis, both the population of activated species and the electron and ion densities are identified through the emissive light spectroscopy and the Langmuir probe method. In addition, the on-line monitoring of the plasmas helps to describe the etching process. DLC coated WC (Co) specimen is first employed to describe the etching mechanism by the present method. Chemical Vapor Deposition (CVD) diamond coated WC (Co) is also employed to demonstrate the reliable capacity of the present high density oxygen plasma etching. This oxygen plasma etching performance is discussed by comparison of the etching rates.

Synergetic effects of surface texturing and solid lubricants to tailor friction and wear – A review

“…Lithography followed by either reactive ion beam etching [80,217,218] or chemical etching [61,219], micro-machining [220] and polymer replication [221] have also been used for indirect texturing of DLCs. Direct texturing of DLCs using alternative approaches other than LST has been mainly achieved by masking the DLC coating and then etching with a reactive ion beam [222][223][224]. A few other approaches do not fit the classification as direct and indirect texturing, but rather refer to simultaneous texturing during coating deposition, such as the deposition of DLC through a mask, thus producing a textured coating [225].…”

Effect of oxygen and fluorine plasma surface treatment of silicon‐incorporated diamond‐like carbon coatings on cellular responses of mouse fibroblasts

“…[1][2][3][4] Diamond-like carbon (DLC) is a type of amorphous carbon with sp 2and sp 3 -hybridized carbon bonds. Owing to its tribological robustness, chemical inertness, and biocompatibility, DLC has been used for various biomedical applications such as biosensors, 5 bio-micro-electromechanical systems (bioMEMS), 6 and medical implants. 7 Various surface modification methods such as surfaceinitiated atom transfer radical polymerization, 8 plasma treatment, 9 electron-beam modification, 10 and solution methods 11 have been utilized for the alteration of DLC surface properties.…”

Simultaneous Nano-Texturing onto a CVD-Diamond Coated Piercing Punch with Femtosecond Laser Trimming

“…Since normal WC-grains can easily drop from the punch edge during piercing, the punch edge curvature is always designed to be more than 10 µm, which is enough to be free from chipping. Hence, the burr height and the affected zones increase inevitably by increasing the number of shots in piercing, as noted in [4,5]. Three methods were developed to accomplish fine piercing without failure [5].…”

“…Hence, the burr height and the affected zones increase inevitably by increasing the number of shots in piercing, as noted in [4,5]. Three methods were developed to accomplish fine piercing without failure [5].…”