2010
DOI: 10.1117/12.853959
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Micro-optical elements functioning in non-visible spectral range

Abstract: Nowadays novel micro-fabrication and wafer-based manufacturing approach allows realizing micro-optics in a way scientists have dreamt for generations, in particular, utilizing nano-imprint lithography as fabrication tooling enables greatly accelerating the micro-optics technology to its frontier. In this report, we present wafer-scale fabrication of various types of micro-optical elements based on photoresist, benzocyclobutene, photocurable imprint resist, and semiconductor materials by using thermal reflow, r… Show more

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“…The computerized FT instrument may save the IR or Raman Spectrum of samples for different data processing's. Thus, it is interesting for many researchers in the fields of biochemistry, biomedicine, biophysics and biomaterials to use both vibrational spectroscopes' to investigate structural components of biosamples [6][7][8] . In many fields such as Biomedicine, Biochemistry, Biophysics and Bio Materials, the biomedical optical spectroscopy techniques such as FT-IR & FT-Raman are interesting.…”
Section: Introductionmentioning
confidence: 99%
“…The computerized FT instrument may save the IR or Raman Spectrum of samples for different data processing's. Thus, it is interesting for many researchers in the fields of biochemistry, biomedicine, biophysics and biomaterials to use both vibrational spectroscopes' to investigate structural components of biosamples [6][7][8] . In many fields such as Biomedicine, Biochemistry, Biophysics and Bio Materials, the biomedical optical spectroscopy techniques such as FT-IR & FT-Raman are interesting.…”
Section: Introductionmentioning
confidence: 99%