Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

Xu, Lei; Dai, Zhengfei; Duan, Guotao; Guo, Lianfeng; Wang, Yi; Zhou, Hong; Liu, Yanxiang; Cai, Weiping; Wang, Yuelin; Li, Tie

doi:10.1038/srep10507

Cited by 56 publications

(32 citation statements)

References 64 publications

(74 reference statements)

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“…Devices made from fresh SbTO solution show higher mobility at a constant level of doping, which indicates that, perhaps, a lower doping level should be desirable to achieve higher on/off current ratio and lower on/off threshold voltage. 33 In general, from our study, it is apparent that aging of the solution affects the TFTs performance, including field-effect mobility, carrier concentration, on/off current ratio and threshold voltage, more significantly than small fluctuations in the thermal annealing temperature, or local fluctuations in the SbTO properties across each film.…”

Section: Resultsmentioning

confidence: 69%

Effects of Solution History on Sol‐Gel Processed Tin‐Oxide Thin‐Film Transistors

et al. 2016

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Antimony‐doped tin‐oxide (SbTO) thin films deposited by solution processing methods represent a promising avenue toward low‐cost transparent and flexible electronics, but reproducibility and performance homogeneity of devices prepared from these thin films have been seldom investigated. In this study, the role of sol‐gel precursor aging is investigated by comparing SbTO thin‐film transistors (TFT) fabricated from two different sol‐gel solutions: the first one was aged for 4 years, whereas the second was prepared freshly. For each of the solutions, a set of TFT was assembled on the same chip, to investigate the distinct roles of aging and sample inhomogeneity on the electronic and transport properties of SbTO. Higher electron mobility, but lower on/off ratios, was found in TFTs assembled from freshly prepared solution, an effect that may be assigned to larger size of SbTO grains. This study demonstrates the critical role of the solution “history” in determining the properties and reproducibility of SbTO TFTs, over other factors, including local film inhomogeneity and local fluctuations of the annealing temperature.

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Section: Resultsmentioning

confidence: 69%

Effects of Solution History on Sol‐Gel Processed Tin‐Oxide Thin‐Film Transistors

et al. 2016

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“…Carbon dioxide (CO 2 ) sensors play an important role in monitoring and controlling indoor air quality. Sensing of CO 2 using inexpensive, miniaturized, highly sensitive sensors that work at room temperature is of great interest for environmental, agricultural applications, Martian atmosphere, and consumer applications 1 . Considering the tremendous impact of CO 2 emissions on the global warming, monitoring of CO 2 has a vital importance in the field of gas sensors.…”

mentioning

confidence: 99%

“…Considering the tremendous impact of CO 2 emissions on the global warming, monitoring of CO 2 has a vital importance in the field of gas sensors. CO 2 sensors are also critical in the food processing industry to maintaining the freshness and shelf life of food, breath analyzers in healthcare, environmental incubators in biotechnology and petrochemical plants in the industry 1 . Also, there is a highly significant need for CO 2 sensors for space and commercial applications including low-false-alarm fire detection inside the spacecraft which detects chemical species indicative of a fire (CO 2 and CO).…”

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confidence: 99%

Enhanced Gas Sensing Properties of Spin-coated Na-doped ZnO Nanostructured Films

Basyooni

Shaban

Sayed

2017

Sci Rep

164

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In this report, the structures, morphologies, optical, electrical and gas sensing properties of ZnO and ZnO: Na spin-coated films are studied. X-ray diffraction (XRD) results reveal that the films are of a single phase wurtzite ZnO with a preferential orientation along (002) direction parallel to c-axis. Na doping reduces the crystalline quality of the films. The plane surface of ZnO film turned to be wrinkle net-work structure after doping. The reflectance and the optical band gap of the ZnO film decreased after Na doping. The wrinkle net-work nanostructured Na-doped film shows an unusually sensitivity, 81.9% @ 50 sccm, for CO2 gas at room temperature compared to 1.0% for the pure ZnO film. The signals to noise ratio (SNR) and detection limit of Na-doped ZnO sensor are 0.24 and 0.42 sccm, respectively. These enhanced sensing properties are ascribed to high surface-to-volume ratio, hoping effect, and the increase of O- vacancies density according to Kroger VinK effect. The response time increased from 179 to 240 s by the incorporation of Na atoms @50 sccm. This response time increased as the CO2 concentration increased. The recovery time is increased from 122 to 472 s by the incorporation of Na atoms @50 sccm.

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“…It has been widely reported that researchers can improve the performance of gas sensors by constantly optimizing the micro-hotplatform (MHP) (4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14) structure and the morphology of sensing materials. (15)(16)(17)(18)(19) For example, in earlier research on MEMS gas sensors, Lee et al (4) described the great advantage of low power consumption compared with traditional gas sensors. Behera and Chandra reported that the heating resistor formed on a SiO 2 platform of 6 μm thickness can save 43.5% of power through planar MEMS technology.…”

Section: Introductionmentioning

confidence: 99%

“…Kadir et al (15) presented well-aligned SnO 2 nanofiber materials that could be operated at 150 ℃ for sensing hydrogen gas. The nanopore array was integrated with the MHP by Xu et al, (16) leading to a strategy of in-site wafer-level fabrication of highperformance and low-power gas sensors. Tan et al reported that an ultrathin nanosheet material mode realized by assembling hollow and hollowed-out Co 3 O 4 microspheres exhibited a high response to ethanol.…”

Section: Introductionmentioning

confidence: 99%

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Peng¹,

Xie²,

Wang³

et al. 2018

Sensors and Materials

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A gas sensor with low power consumption was manufactured using a suspended microhotplatform (MHP) fabricated by MEMS technology. Tin oxide nanoparticles, synthesized by the hydrothermal method, were deposited on the MHP by dip coating in the form of slurry. The obtained SEM images indicated that nanoparticles were well connected and uniform in size. The gas sensing performance was also investigated in both dynamic and static test systems. In the dynamic test system, the response (R air /R gas) of the sensor exhibited a representative linear relationship with hydrogen at a power of 14.42 mW and changed from 1.17 to 4.51 at 5 to 100 ppm hydrogen. In the static test system, the sensor demonstrated an obvious response to ethanol, ammonia, and glycol; the response to the target gas of ammonia at a concentration of 120 ppm reached up to 23.94. The power consumption of the sensor was only 16 mW with a platinum (Pt) heating resistor at 255 ℃.

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Micro/Nano Gas Sensors: A New Strategy Towards In-Situ Wafer-Level Fabrication of High-Performance Gas Sensing Chips

Cited by 56 publications

References 64 publications

Effects of Solution History on Sol‐Gel Processed Tin‐Oxide Thin‐Film Transistors

Effects of Solution History on Sol‐Gel Processed Tin‐Oxide Thin‐Film Transistors

Enhanced Gas Sensing Properties of Spin-coated Na-doped ZnO Nanostructured Films

Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

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