Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Peng, Shufeng; Xie, Dongcheng; Wang, Jin; Chen, Minqiang; Xu, Lei

doi:10.18494/sam.2018.2006

Cited by 7 publications

(4 citation statements)

References 31 publications

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“…The sensing film was PPy/RGO, which was synthesized using the oxidation-reduction method. Most ammonia gas sensors use a micro-heater [9][10][11][12][13] to generate an appropriate WT of 225-330 • C for the sensing film, so the power consumption is quite high. This study details the production of an AGS without a micro-heater, which operates at room temperature, so it is very efficient in terms of power consumption.…”

Section: Discussionmentioning

confidence: 99%

“…Table 1 lists the process method, sensing material, and working temperature of various ammonia gas sensors. Peng [9] used the MEMS process to produce an ammonia gas sensor (AGS) with a micro-hotplate that consumed less power. The AGS used nanoparticulate tin dioxide as the gas sensing material, which was prepared using the hydrothermal method.…”

Section: Introductionmentioning

confidence: 99%

“…The oxidation-reduction method is used to synthesize the sensing film, which consists of PPy/RGO. Most gas sensors [6][7][8][9][10][11][12] have a heater to generate the WT for the sensitive film, but this study produced an AGS without a micro-heater. This AGS operates at room temperature, so it is more efficient in terms of power consumption.…”

Section: Introductionmentioning

confidence: 99%

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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique

et al. 2020

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This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are the stacked aluminum layers that are made using the CMOS process. The sensing material; polypyrrole/reduced graphene oxide (PPy/RGO), is synthesized using the oxidation–reduction method; and the material is characterized using an electron spectroscope for chemical analysis (ESCA), a scanning electron microscope (SEM), and high-resolution X-ray diffraction (XRD). After the CMOS process; the AGS needs post-processing to etch an oxide layer and to deposit the sensing material. The resistance of the AGS changes when it is exposed to ammonia. A non-inverting amplifier circuit converts the resistance of the AGS into a voltage signal. The AGS operates at room temperature. Experiments show that the AGS response is 4.5% at a concentration of 1 ppm NH3; and it exhibits good repeatability. The lowest concentration that the AGS can detect is 0.1 ppm NH3

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique

et al. 2020

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“…Available hydrogen leak detectors can be classified according to the type of transducer they use. The main transducers used in instruments for gas analysis include electrochemical, (4) semiconductor, (5) and catalytic sensors. (6,7) Each type of sensor has its own advantages and disadvantages, which determine their fields of application.…”

Section: Introductionmentioning

confidence: 99%

Development of an Approach to Increase Hydrogen Measurement Selectivity

Ivanov¹,

Баранов²,

Миронов³

et al. 2023

Sensors and Materials

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Hydrogen monitoring in industrial premises, when other gases are also present in air, is an urgent task. For safety reasons, it is necessary that a hydrogen sensor provides measurements at the lowest possible temperature. In this paper, we propose an approach to the selective measurement of the concentration of hydrogen, which is part of multicomponent hydrocarbon mixtures. Binary and ternary mixtures of hydrogen with methane, propane, and butane were used in this study. The traditional method is based on measuring the catalytic sensor response, and a new method that is based on measuring the amount of heat released during hydrogen combustion was used to solve the problem of selectivity. An industrial catalytic sensor was used for the measurements. It was shown that for the selective measurement of hydrogen in hydrocarbon mixtures, it is necessary to reduce the sensor temperature below 200 ℃. Measurements of hydrogen concentration and a comparison of results were carried out at 105 ℃. Such a low operating temperature is an excellent result for a catalytic sensor. It is shown that the method based on measuring the amount of heat released during hydrogen combustion is more accurate than the traditional method, and the average error was 7.7%.

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A High Linearity Detection Circuit with Constant Detection Voltage for Resistive Gas Sensor

Chen

Peng

et al. 2019

2019 IEEE 4th Advanced Information Technology, Electronic and Automation Control Conference (IAEAC)

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Integration of SnO2 Nanoparticles with Micro-hotplatform for Low-power-consumption Gas Sensors

Cited by 7 publications

References 31 publications

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique

Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique

Development of an Approach to Increase Hydrogen Measurement Selectivity

A High Linearity Detection Circuit with Constant Detection Voltage for Resistive Gas Sensor

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