Micro-machined gas sensor array based on metal film micro-heater

Mo, Yaowu; Okawa, Yuzo; Tajima, Motoshi; Nakai, Takehito; Yoshiike, Nobuyuki; Natukawa, Kazuki

doi:10.1016/s0925-4005(01)00871-1

Cited by 114 publications

(63 citation statements)

References 10 publications

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“…The favorable neck size (i.e., below twice the Debye length) at low SiO 2 content leads to exceptionally high sensitivity, which is preserved by the high thermal stability of the Si-doped SnO 2 crystals. The response of our 2.5 wt % SiO 2 -doped sensor to 10 ppm EtOH at about 300 8C is 2-10 times higher than that of pure SnO 2 [23,[34][35][36] (even at higher EtOH concentrations) and 8-fold that of commercial sensors such as TGS 822. [34] The highest response at 300 and 400 8C of Ag-doped SnO 2 sensors [4] to 1000 ppm EtOH is 22-40, respectively, while that of the present 2.5 wt % SiO 2 -doped one to 50 ppm (1/20th of their [4] concentration) is 318, corresponding to 14-8 times improvement, respectively.…”

Section: Sensor Performancementioning

confidence: 98%

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability

Tricoli

Gräf

Pratsinis

2008

Adv Funct Materials

197

179

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Tin oxide nanocrystals (5–10 nm) doped with silica (0–15 wt %) were made by flame‐spray‐pyrolysis direct deposition onto the sensing electrodes and in situ stabilization by rapid flame annealing. Although increased SiO2‐doping reduced the SnO2 crystal and grain size, its sensing performance to ethanol vapor (0.1–50 ppm) exhibited an optimum with respect to SiO2 content. The thermal stability and morphology of SiO2‐doped SnO2 nanoparticles were evaluated by sintering at 200–900 °C for 4–24 h in air. At low SiO2 content, sintering of SnO2 was prevented only partially resulting in small sinter necks (bottlenecks) between SnO2 primary particles (smaller than twice the Debye length). This morphology drastically enhanced the sensitivity toward the analyte by maintaining a thermally stable high surface area and fully depleted connections at the primary particle necks. This enhancement is attributed mostly to the decreasing neck size of the SnO2SiO2 heterojunctions rather than the decreasing SnO2 crystallite and grain sizes with increasing SiO2 doping. At high SiO2 contents, SnO2 sintering was inhibited as its grains were separated effectively by dielectric SiO2; this resulted in isolated SnO2 nanocrystals with drastically reduced sensitivity, thereby effectively being insulators.

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Section: Sensor Performancementioning

confidence: 98%

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability

Tricoli

Gräf

Pratsinis

2008

Adv Funct Materials

197

179

View full text Add to dashboard Cite

show abstract

“…The three sensing layers were deposited on an IDT platinum electrode and were successfully sintered at 1100 °C for 2 h. Overall the gas sensor array size is 1.5 cm 2 and the distance between the sensing layers is 100 μm. Although the other literatures did not precisely specify the distance between the sensing layers, their sizes were in the range of about 0.5-1 mm [14][15][16]. Proposed design of gas sensor array will contribute to miniaturizing the sensor array.…”

Section: Discussionmentioning

confidence: 99%

Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

Jang

Kim

2016

Micro and Nano Syst Lett

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This paper reports on a semiconductor gas sensor array to detect nitrogen oxides (NO x ) in automotive exhaust gas. The proposed semiconductor gas sensor array consisted of one common electrode and three individual electrodes to minimize the size of the sensor array, and three sensing layers [TiO 2 + SnO 2 (15 wt%), SnO 2 , and Ga 2 O 3 ] were deposited using screen printing. In addition, sensing materials were sintered under the same conditions in order to take advantage of batch processing. The sensing properties of the proposed sensor array were verified by experimental measurements, and the selectivity improved by using pattern recognition.

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“…For example, a temperature of 500 °C was reported for reversible O 2 sensing using ZnO thin films that were obtained with chemical vapor deposition [7]. Such temperatures can be reached with integrated microheaters that use a heating power of approximately 10 mW, which is far above the power specifications of lowpower autonomous systems [8]. Thus, as mentioned, the operational temperature of metal oxide thin film sensors needs to be strongly reduced to meet the power specifications required to enable distributed sensing opportunities.…”

Section: Personal Area Networkmentioning

confidence: 99%

More Moore meets More than Moore: Enabling healthcare applications

Brongersma

Blauw

Zevenbergen

et al. 2013

Phys. Status Solidi C

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Western societies all see their healthcare costs outpace GDP growth. To reverse this trend, several public and private initiatives were taken in the last years to make healthcare more cost efficient. It is anticipated that micro and nano‐system technology will help enable an increase in the functionality of lifestyle and healthcare devices to gradually reduce cost. This builds on the scaling of microelectronics that additionally provides opportunities for reducing both form factor and power requirements. In the next decade, body area network technology will be one of the advancements that provides medical, lifestyle, assisted living, sports or entertainment functions for the user. Such a network comprising a series of miniature sensor nodes, implanted or located around the body should be able to communicate with other sensor nodes and/or with a gateway node that provides a connection to the outside world using a standard telecommunication infrastructure. Early deployment of technology in different application cases are translated into critical technology obstacles that need to be solved in order to enable widespread deployment. For the development of smaller and smarter systems with ever increasing autonomy, key technological challenges are addressed at the level of sensors, energy harvesting, ultra‐low‐power DSP, wireless connectivity, and integration and packaging. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Micro-machined gas sensor array based on metal film micro-heater

Cited by 114 publications

References 10 publications

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability

Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

More Moore meets More than Moore: Enabling healthcare applications

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Micro-machined gas sensor array based on metal film micro-heater

Cited by 114 publications

References 10 publications

Optimal Doping for Enhanced SnO2 Sensitivity and Thermal Stability

Optimal Doping for Enhanced SnO2 Sensitivity and Thermal Stability

Batch-processed semiconductor gas sensor array for the selective detection of NOx in automotive exhaust gas

More Moore meets More than Moore: Enabling healthcare applications

Contact Info

Product

Resources

About

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability

Optimal Doping for Enhanced SnO₂ Sensitivity and Thermal Stability