Micro-liquid flow sensor

Lammerink, Theodorus S.J.; Tas, Niels Roelof; Elwenspoek, Michael Curt; Fluitman, J.H.J.

doi:10.1016/0924-4247(93)80010-e

Cited by 169 publications

(96 citation statements)

References 5 publications

(5 reference statements)

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“…Although differential temperature flow sensors have been widely investigated [1][2][3][4][5][6], very few works have been devoted to find the impact of the sensor structure and dimensions on the key figures of merit of the devices [14][15][16][17][18][19][20]. Fluid dynamic simulations provide useful indications on particular aspects of the sensor operation, but are unable to embrace the whole transduction process, involving different physical domains that altogether contribute to the sensor performance.…”

Section: Open Accessmentioning

confidence: 99%

“…Possible alternatives to the structure shown in Figure 1(a) are often used. A simple modification is the replacement of the thermopiles with resistive temperature detectors (RTD) [14,17,24], with the drawback of an additional offset term derived from resistor mismatch. Another variant that adds robustness to the device, but requires front-to-back alignment equipments and significantly longer etching times, is the placement of all sensor elements on a single closed membrane [25].…”

Section: Description Of the Sensor Structure And Main Performance Parmentioning

confidence: 99%

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Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip, including several different sensing structures and a flexible electronic interface.

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Section: Open Accessmentioning

confidence: 99%

Section: Description Of the Sensor Structure And Main Performance Parmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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“…Besides their small footprint, microsensors possess many advantages such as high precision, low power consumption, fast response, and low-cost batch production [1][2][3][4]. Spurred by the development of silicon micromachining, small multifunctional components have been successfully combined with traditional sensor technologies to enhance functionality, for example, in micro flow sensors [5][6][7], micro temperature sensors [5], micro heaters [5,8], micro pressure sensors [5], etc.…”

Section: Introductionmentioning

confidence: 99%

A micromachined thin-film gas flow sensor for microchemical reactors

Shin¹,

Besser

2006

J. Micromech. Microeng.

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As microchemical systems (MCS) have gained in importance since their introduction in the last decade, it has become recognized that appropriate sensing and control capabilities are needed if MCS are to reach their potential. In this context, we present a study of the working behavior of a novel thin-film micro flow sensor which is integrated with a silicon microreactor with a submillimeter channel. A simple-to-fabricate device based on the concept of calorimetric sensing was chosen as a model structure to understand the important factors controlling sensor performance. Various design options for the sensor were explored by the use of computational fluid dynamics simulations. We found that sensitivity depends strongly on certain design factors. In summary, sensitivity is improved with (a) higher values of the resistors that detect flowinduced temperature changes, (b) shorter distances between the resistor that provides a source of heat and the thermally sensitive resistors and (c) higher input power to the heating resistor. Item (a) was found to have by far the strongest effect of the three. Reproducibility tests were conducted and the sensor exhibited consistent performance throughout the entire test range of 0 to 20 sccm which is an appropriate fit to the flow capacity of the microchannel. Finally, response time was assessed by simulating the transient behavior of the sensor with a thermal capacitance model, which yielded an accurate prediction of the experimental response of the device. The response time is approximately 70 msec at a typical flow rate of 10 sccm.According to the understanding gained by the model, the sensor response time can be improved by reducing the substrate thickness, using a lower density substrate material, and increasing the convective heat transfer coefficient in the channel.3

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“…The higher performances obtained by Tai et al [19] and the fabrication of the first flow sensor with integrated micro channel [20], encouraged the interest of researchers in the development of micromachined flow sensors. This is confirmed by numerous and interesting works in the eighties and nineties, which presented several flow sensors with various principles of measurement and performances [17,[21][22][23][24][25]. During the last decade the interest of the scientific community is still growing and some works with valuable peculiarities (e.g., multi-range sensors to facilitate the measurement of both low and high gas velocity, very low power consumption sensors, miniaturized sensors) have been reported [26][27][28][29].…”

Section: Thermal Flow Sensorsmentioning

confidence: 72%

Micromachined Flow Sensors in Biomedical Applications

Silvestri

Schena

2012

Micromachines

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Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very small flow, and small size). Moreover, the feedback provided by integrating microflow sensors to micro mass flow controllers is essential to deliver accurately set target small flows. This paper is a review of some application areas in the biomedical field of micromachined flow sensors, such as blood flow, respiratory monitoring, and drug delivery among others. Particular attention is dedicated to the description of the measurement principles utilized in early and current research. Finally, some observations about characteristics and issues of these devices are also reported.

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Micro-liquid flow sensor

Cited by 169 publications

References 5 publications

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

A micromachined thin-film gas flow sensor for microchemical reactors

Micromachined Flow Sensors in Biomedical Applications

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